为高性能湿度传感器制造高有序纳米柱阵列电极

IF 5.5 3区 工程技术 Q1 BIOCHEMICAL RESEARCH METHODS
Sung Tae Jang, Seo Jin Kim, Jueun Kim, Eun Seop Yoon, Oh Seok Kwon, Kyoung G. Lee, Bong Gill Choi
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引用次数: 0

摘要

湿度传感器应用广泛,可提供适宜的环境条件。高性能湿度传感器需要高灵敏度的活性位点来检测水分子。本研究开发了一种基于纳米柱阵列的电极(NAE),它具有较大的比表面积,适用于各种湿度传感材料。与平面电极相比,通过光刻和软光刻技术制作的纳米柱阵列电极具有更优越的电化学电容和扩散行为。基于 NAE 的湿度传感器具有高灵敏度和线性度、低滞后误差和 25 天的长期稳定性。此外,湿度传感器在机械弯曲状态下也能保持稳定的阻抗信号。此外,通过测量植物蒸腾过程中的湿度变化,还证明了湿度传感器的实时监测性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Fabrication of Highly Ordered Nanopillar Array Electrode for High-Performance Humidity Sensors

Fabrication of Highly Ordered Nanopillar Array Electrode for High-Performance Humidity Sensors

Humidity sensors are used in various applications to provide suitable environmental conditions. High-performance humidity sensors require highly sensitive active sites to detect water molecules. In this study, a nanopillar-array-based electrode (NAE) was developed, which has a large specific surface area and is applicable to various humidity-sensing materials. The NAE, which was fabricated via photo-lithography and soft lithography, exhibited superior electrochemical capacitance and diffusion behavior compared to flat electrodes. The NAE-based humidity sensor exhibited a high sensitivity and linearity, low hysteresis error, and long-term stability for a duration of 25 days. Moreover, the humidity sensor maintained a consistent impedance signal in a mechanically bent state. Furthermore, the real-time monitoring performance of the humidity sensor was demonstrated by measuring humidity changes during plant transpiration.

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来源期刊
BioChip Journal
BioChip Journal 生物-生化研究方法
CiteScore
7.70
自引率
16.30%
发文量
47
审稿时长
6-12 weeks
期刊介绍: BioChip Journal publishes original research and reviews in all areas of the biochip technology in the following disciplines, including protein chip, DNA chip, cell chip, lab-on-a-chip, bio-MEMS, biosensor, micro/nano mechanics, microfluidics, high-throughput screening technology, medical science, genomics, proteomics, bioinformatics, medical diagnostics, environmental monitoring and micro/nanotechnology. The Journal is committed to rapid peer review to ensure the publication of highest quality original research and timely news and review articles.
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