基于铬-银-金复合隔膜和 MEMS 螺旋微流孔的用于 mHz 次声探测的微型高灵敏度光纤法布里-佩罗传感器

{"title":"基于铬-银-金复合隔膜和 MEMS 螺旋微流孔的用于 mHz 次声探测的微型高灵敏度光纤法布里-佩罗传感器","authors":"Peijie Wang, Yufeng Pan, Ping Lu, Jiangshan Zhang, Jie Zhai, Deming Liu","doi":"10.1364/prj.519946","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":509469,"journal":{"name":"Photonics Research","volume":"105 4","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Miniaturized and highly-sensitive fiber-optic Fabry-Pérot sensor for mHz infrasound detection based on Cr-Ag-Au composite diaphragm and MEMS spiral micro-flow hole\",\"authors\":\"Peijie Wang, Yufeng Pan, Ping Lu, Jiangshan Zhang, Jie Zhai, Deming Liu\",\"doi\":\"10.1364/prj.519946\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":509469,\"journal\":{\"name\":\"Photonics Research\",\"volume\":\"105 4\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics Research\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/prj.519946\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics Research","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/prj.519946","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}