{"title":"回顾：\"微机电系统（MEMS）在使纳米系统和纳米结构更小、更快、更便宜方面取得了成功。如今的微机电系统设备通常只有微米（10 到 6 纳米）大小，包括安全气囊加速度计\"。","authors":"Kelara Simpson","doi":"10.32388/1xbj20","DOIUrl":null,"url":null,"abstract":"<jats:p />","PeriodicalId":500839,"journal":{"name":"Qeios","volume":"1995 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Review of: \\\"Microelectromechanical systems (MEMS) have proven successful in making nanosystems and nanostructures smaller, faster, and cheaper. Today's MEMS devices, typically made to micron (10 to 6 nanometers) in size, include airbag accelerometers\\\"\",\"authors\":\"Kelara Simpson\",\"doi\":\"10.32388/1xbj20\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<jats:p />\",\"PeriodicalId\":500839,\"journal\":{\"name\":\"Qeios\",\"volume\":\"1995 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Qeios\",\"FirstCategoryId\":\"0\",\"ListUrlMain\":\"https://doi.org/10.32388/1xbj20\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Qeios","FirstCategoryId":"0","ListUrlMain":"https://doi.org/10.32388/1xbj20","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Review of: "Microelectromechanical systems (MEMS) have proven successful in making nanosystems and nanostructures smaller, faster, and cheaper. Today's MEMS devices, typically made to micron (10 to 6 nanometers) in size, include airbag accelerometers"
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
