A. Luchechko, V. Vasyltsiv, M. Kushlyk, L. Kostyk, D. Slobodzyan
{"title":"掺杂 Zr4+ 或 Ca2+ 离子的 β-Ga2O3-In2O3 多晶固溶体的导电性、发光和深受体水平","authors":"A. Luchechko, V. Vasyltsiv, M. Kushlyk, L. Kostyk, D. Slobodzyan","doi":"10.1116/6.0003466","DOIUrl":null,"url":null,"abstract":"Photoluminescence, luminescence excitation spectra, and electrical conductivity of β-Ga2O3-In2O3 solid solutions were studied. For this purpose, polycrystalline samples of unintentionally doped (UID) and doped with Ca or Zr β-Ga2O3-In2O3 solid solution with 20% In were synthesized and characterized. All samples were obtained by the high-temperature solid-phase method from appropriate oxides at 1300 °C at low and high oxygen partial pressure. It was established that UID and doped with Ca2+ or Zr4+ samples synthesized in an oxygen atmosphere were highly resistive, while the samples synthesized in an argon atmosphere had high conductivity. The conductivity was the lowest in the samples doped with Ca2+ and was 10−13 Ω−1 cm−1, while in the samples doped with Zr4+, the electrical conductivity was the highest and reached 10−3 Ω−1 cm−1. The broadband luminescence of β-Ga2O3-In2O3 solid solution is a superposition of three elementary bands with maxima in the violet 3.08 eV, blue 2.73 eV, and green 2.45 eV regions of the spectrum. Doping with Ca2+ or Zr4+ impurities and varying the synthesis atmosphere led mainly to a redistribution of intensities between the elementary luminescence bands. The luminescence arises from the radiative recombination of charge carriers through donor–acceptor pairs and self-localized holes. Donors and acceptors are formed by native defects such as (Gai, VGa, VGaVo) or doping impurities (Zr4+, Ca2+). Unlike the luminescence spectra, the luminescence excitation spectra change significantly when the synthesis conditions vary or when doping with divalent impurities. The excitation band at 4.46 eV is due to electron transitions from the VGa or VGaVO acceptor levels to the conduction band. Electron transitions from acceptor levels of Ca2+ impurities are manifested in the intense excitation band at 4.1 eV.","PeriodicalId":170900,"journal":{"name":"Journal of Vacuum Science & Technology A","volume":"70 s1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Electrical conductivity, luminescence, and deep acceptor levels in β-Ga2O3-In2O3 polycrystalline solid solution doped with Zr4+ or Ca2+ ions\",\"authors\":\"A. Luchechko, V. Vasyltsiv, M. Kushlyk, L. Kostyk, D. Slobodzyan\",\"doi\":\"10.1116/6.0003466\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Photoluminescence, luminescence excitation spectra, and electrical conductivity of β-Ga2O3-In2O3 solid solutions were studied. For this purpose, polycrystalline samples of unintentionally doped (UID) and doped with Ca or Zr β-Ga2O3-In2O3 solid solution with 20% In were synthesized and characterized. All samples were obtained by the high-temperature solid-phase method from appropriate oxides at 1300 °C at low and high oxygen partial pressure. It was established that UID and doped with Ca2+ or Zr4+ samples synthesized in an oxygen atmosphere were highly resistive, while the samples synthesized in an argon atmosphere had high conductivity. The conductivity was the lowest in the samples doped with Ca2+ and was 10−13 Ω−1 cm−1, while in the samples doped with Zr4+, the electrical conductivity was the highest and reached 10−3 Ω−1 cm−1. The broadband luminescence of β-Ga2O3-In2O3 solid solution is a superposition of three elementary bands with maxima in the violet 3.08 eV, blue 2.73 eV, and green 2.45 eV regions of the spectrum. Doping with Ca2+ or Zr4+ impurities and varying the synthesis atmosphere led mainly to a redistribution of intensities between the elementary luminescence bands. The luminescence arises from the radiative recombination of charge carriers through donor–acceptor pairs and self-localized holes. Donors and acceptors are formed by native defects such as (Gai, VGa, VGaVo) or doping impurities (Zr4+, Ca2+). Unlike the luminescence spectra, the luminescence excitation spectra change significantly when the synthesis conditions vary or when doping with divalent impurities. The excitation band at 4.46 eV is due to electron transitions from the VGa or VGaVO acceptor levels to the conduction band. 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引用次数: 0
摘要
研究了β-Ga2O3-In2O3 固溶体的光致发光、发光激发光谱和导电性。为此,合成并表征了无意掺杂(UID)和含 20% In 的掺 Ca 或 Zr β-Ga2O3-In2O3 固溶体的多晶样品。所有样品都是通过高温固相法在 1300 ℃、低氧分压和高氧分压下从适当的氧化物中获得的。结果表明,在氧气氛中合成的 UID 和掺有 Ca2+ 或 Zr4+ 的样品电阻率很高,而在氩气氛中合成的样品电导率很高。掺杂 Ca2+ 的样品导电率最低,为 10-13 Ω-1 cm-1,而掺杂 Zr4+ 的样品导电率最高,达到 10-3 Ω-1 cm-1。β-Ga2O3-In2O3 固溶体的宽带发光是三个基本波段的叠加,最大值分别位于光谱的紫色 3.08 eV、蓝色 2.73 eV 和绿色 2.45 eV 区域。掺入 Ca2+ 或 Zr4+ 杂质以及改变合成气氛主要导致基本发光带之间强度的重新分配。发光源于电荷载流子通过供体-受体对和自定位空穴的辐射重组。供体和受体由原生缺陷(Gai、VGa、VGaVo)或掺杂杂质(Zr4+、Ca2+)形成。与发光光谱不同,当合成条件发生变化或掺入二价杂质时,发光激发光谱会发生显著变化。4.46 eV 处的激发带是由于电子从 VGa 或 VGaVO 受体水平跃迁到导带所致。来自 Ca2+ 杂质受主级的电子跃迁表现为 4.1 eV 处的强激发带。
Electrical conductivity, luminescence, and deep acceptor levels in β-Ga2O3-In2O3 polycrystalline solid solution doped with Zr4+ or Ca2+ ions
Photoluminescence, luminescence excitation spectra, and electrical conductivity of β-Ga2O3-In2O3 solid solutions were studied. For this purpose, polycrystalline samples of unintentionally doped (UID) and doped with Ca or Zr β-Ga2O3-In2O3 solid solution with 20% In were synthesized and characterized. All samples were obtained by the high-temperature solid-phase method from appropriate oxides at 1300 °C at low and high oxygen partial pressure. It was established that UID and doped with Ca2+ or Zr4+ samples synthesized in an oxygen atmosphere were highly resistive, while the samples synthesized in an argon atmosphere had high conductivity. The conductivity was the lowest in the samples doped with Ca2+ and was 10−13 Ω−1 cm−1, while in the samples doped with Zr4+, the electrical conductivity was the highest and reached 10−3 Ω−1 cm−1. The broadband luminescence of β-Ga2O3-In2O3 solid solution is a superposition of three elementary bands with maxima in the violet 3.08 eV, blue 2.73 eV, and green 2.45 eV regions of the spectrum. Doping with Ca2+ or Zr4+ impurities and varying the synthesis atmosphere led mainly to a redistribution of intensities between the elementary luminescence bands. The luminescence arises from the radiative recombination of charge carriers through donor–acceptor pairs and self-localized holes. Donors and acceptors are formed by native defects such as (Gai, VGa, VGaVo) or doping impurities (Zr4+, Ca2+). Unlike the luminescence spectra, the luminescence excitation spectra change significantly when the synthesis conditions vary or when doping with divalent impurities. The excitation band at 4.46 eV is due to electron transitions from the VGa or VGaVO acceptor levels to the conduction band. Electron transitions from acceptor levels of Ca2+ impurities are manifested in the intense excitation band at 4.1 eV.