Advait Gilankar, Ahmad Islam, M. McCartney, Abishek Katta, Nabasindhu Das, David J. Smith, N. Kalarickal
{"title":"接通电压低于 1 V、击穿电压达到千伏级的 3 级场镀β-Ga2O3 SBD 和 HJD","authors":"Advait Gilankar, Ahmad Islam, M. McCartney, Abishek Katta, Nabasindhu Das, David J. Smith, N. Kalarickal","doi":"10.35848/1882-0786/ad36ab","DOIUrl":null,"url":null,"abstract":"\n A unique field termination structure combining a 3-step field-plate with N-ion implantation to enhance the reverse breakdown performance of Pt/β-Ga2O3 schottky diodes (SBDs) and NiO/β-Ga2O3 heterojunction diodes (HJDs) is reported. The fabricated devices showed a low Ron,sp of 6.2 mΩ-cm2 for SBDs and 6.8 mΩ-cm2 for HJDs, respectively. HJDs showed a 0.8V turn-on voltage along with an ideality factor of 1.1 leading to a low effective on-resistance of 18 mΩ-cm2. The devices also showed low reverse leakage current (<1mA/cm2) and a breakdown voltage of ~1.4 kV. These results offer an alternative simpler route for fabricating high-performance kilo-volt class β-Ga2O3 diode.","PeriodicalId":503885,"journal":{"name":"Applied Physics Express","volume":" 36","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"3-step field-plated β-Ga2O3 SBDs and HJDs with sub-1 V turn-on and kilo-volt class breakdown\",\"authors\":\"Advait Gilankar, Ahmad Islam, M. McCartney, Abishek Katta, Nabasindhu Das, David J. Smith, N. Kalarickal\",\"doi\":\"10.35848/1882-0786/ad36ab\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n A unique field termination structure combining a 3-step field-plate with N-ion implantation to enhance the reverse breakdown performance of Pt/β-Ga2O3 schottky diodes (SBDs) and NiO/β-Ga2O3 heterojunction diodes (HJDs) is reported. The fabricated devices showed a low Ron,sp of 6.2 mΩ-cm2 for SBDs and 6.8 mΩ-cm2 for HJDs, respectively. HJDs showed a 0.8V turn-on voltage along with an ideality factor of 1.1 leading to a low effective on-resistance of 18 mΩ-cm2. The devices also showed low reverse leakage current (<1mA/cm2) and a breakdown voltage of ~1.4 kV. These results offer an alternative simpler route for fabricating high-performance kilo-volt class β-Ga2O3 diode.\",\"PeriodicalId\":503885,\"journal\":{\"name\":\"Applied Physics Express\",\"volume\":\" 36\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-03-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Physics Express\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.35848/1882-0786/ad36ab\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Physics Express","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.35848/1882-0786/ad36ab","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
3-step field-plated β-Ga2O3 SBDs and HJDs with sub-1 V turn-on and kilo-volt class breakdown
A unique field termination structure combining a 3-step field-plate with N-ion implantation to enhance the reverse breakdown performance of Pt/β-Ga2O3 schottky diodes (SBDs) and NiO/β-Ga2O3 heterojunction diodes (HJDs) is reported. The fabricated devices showed a low Ron,sp of 6.2 mΩ-cm2 for SBDs and 6.8 mΩ-cm2 for HJDs, respectively. HJDs showed a 0.8V turn-on voltage along with an ideality factor of 1.1 leading to a low effective on-resistance of 18 mΩ-cm2. The devices also showed low reverse leakage current (<1mA/cm2) and a breakdown voltage of ~1.4 kV. These results offer an alternative simpler route for fabricating high-performance kilo-volt class β-Ga2O3 diode.
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