基于 GM 低温冷却器的低温薄膜测量系统的片状电阻设计

Zhen Geng, Ye Mao Han, Zheng Rong Zhou, Hao Ying Qi, Yu Chen Zhao, Hao Jian Su, Rong Jin Huang, Lai Feng Li
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引用次数: 0

摘要

确定薄膜电阻率与温度的关系对于了解这些薄膜的传导机制和众多技术应用都非常重要。在这项工作中,为了表征薄膜的电特性,我们构建了一个基于 GM 低温冷却器的自动板温范围电特性测量系统。该系统可同时测量多个样品。利用时间离散差分法模拟了冷却过程,以验证优化的设备设计参数,并最大限度地减少热损失。此外,还将随温度变化的板电阻结果与物理特性测量系统的结果进行了比较。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design of Electrical Sheet Resistance of Thin Film Measurement System Based on GM Cryocooler in Cryogenic Temperature
The determination of the dependencies of the electrical resistivity of the thin film to temperature is of great importance both for understanding the conduction mechanism and for numerous technical applications of these films. In this work, to characterize, the electrical properties of thin films, a GM cryocooler-based automatic board temperature range electrical properties measurement system has been constructed. The system can measure multiple samples simultaneously. The cooling process was simulated using the time-discrete differencing to validate the optimized device design parameters and minimize heat losses. Furthermore, the temperature-dependent sheet resistance results were compared with the results from the physical property measurement system.
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