Experimental Study and Analysis of Sub-Micron Scale Air Gap Breakdown

In order to study the mechanism of submicron-scale air gap discharge, the gas discharge experiment with electrode gap of 0.3–10 um was carried out by using nano-positioning system under atmospheric pressure. The breakdown voltages of stainless steel, brass, copper, and aluminum electrodes were measured. The experimental results are obviously deviated from the Paschen curve, and the Paschen curve cannot explain the air gap breakdown voltage. It is found that in the range of 0.3–5 um, the material work function significantly affects the air gap breakdown voltage, and it is not obvious in the range of 5–10 um. By studying the breakdown field strength, current density and F–N theory, it is found that when the electrode gap is 0.3–5 um, the field emission is dominant, resulting in the breakdown voltage deviating from the Paschen curve. In addition, the breakdown voltages under different discharge mechanisms are numerically calculated, and the numerical results are compared with the experimental results. The results show that only field emission needs to be considered at the gap of 0.3–2 um, and other discharge mechanisms can be ignored. Through the research of this paper, it provides a basis for the in-depth study of sub-micron electrical breakdown and the design of microelectronic devices.