在可回收塑料基板上制造的氮化锌薄膜晶体管的光传感特性

Miguel A. Dominguez, Jose Luis Pau, Andrés Redondo-Cubero
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引用次数: 0

摘要

本研究介绍了氮化锌(Zn3N2)薄膜晶体管(TFT)作为光电晶体管的特性。聚对苯二甲酸乙二醇酯被用作可回收塑料基板。氧化锌(ZnO)薄膜用作钝化层。Zn3N2 和 ZnO 薄膜在室温下通过磁控溅射沉积而成。对灵敏度、响应度和检测度进行了提取和分析。有趣的是,发现了检测率最大值与阈值电压 VT 之间的关系。此外,还分析了在空气中放置 100 天后的电气特性,以评估其在环境条件下的稳定性。据我们所知,这是首次对作为光电晶体管的 Zn3N2 TFT 进行表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Photosensing properties of zinc nitride thin-film transistors fabricated on recyclable plastic substrates
In this work, the characterization of zinc nitride (Zn3N2) Thin-film Transistors (TFTs) as phototransistors is presented. Polyethylene terephthalate is used as recyclable plastic substrate. A zinc oxide (ZnO) film is used as passivation layer. The Zn3N2 and ZnO films are deposited at room temperature using a magnetron sputtering. The sensitivity, responsivity and detectivity were extracted and analyzed. Interestingly, a relation between the maximum value of detectivity and the threshold voltage VT was found. Moreover, the electrical characteristics are analyzed after 100 days on air to evaluate the stability under ambient conditions. To the best of our knowledge, the characterization of Zn3N2 TFTs as phototransistors is presented for the first time.
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