偏振调制图案化激光雕刻光功能分层微/纳米结构

IF 8 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Pei Qiu, Dandan Yuan, Jiaxu Huang, Jun Li, Jin Hu, Shaolin Xu
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引用次数: 0

摘要

分层微/纳米结构因其在光调制方面的能力而备受关注,但在微米和纳米尺度上灵活制造设计的光学功能结构仍具有挑战性。本文提出了一种偏振调制图案化激光烧蚀方法,并辅以流动液体,以制造具有可调横截面的分层微槽和具有可控周期和方向的雕刻表面纳米结构。液体辅助烧蚀通过激光诱导的微射流抵消了烧蚀碎片的屏蔽效应,确保通过调节焦平面上的激光图案来精确控制微槽的形状。同时,由于没有碎屑,激光诱导的周期性表面结构(LIPSS)也能在整个微槽中稳定形成。通过操纵激光光斑内的脉冲能量和偏振,可以精细调整激光诱导周期表面结构(LIPSS)的周期和方向,从而促进分层微/纳米结构的创建,满足光学应用的需要。作为演示,我们制作了具有定向定制 LIPSS 特征的炽热光栅,其衍射效率与偏振有关。激光制造技术为在难以加工的材料上雕刻形状可控的分层光栅提供了一种高度通用的解决方案,为快速生产定制光学元件铺平了道路。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Polarization-Modulated Patterned Laser Sculpturing of Optical Functional Hierarchical Micro/Nanostructures

Polarization-Modulated Patterned Laser Sculpturing of Optical Functional Hierarchical Micro/Nanostructures

Polarization-Modulated Patterned Laser Sculpturing of Optical Functional Hierarchical Micro/Nanostructures

Hierarchical micro/nanostructures have garnered considerable attention for their capabilities in light modulation, but the flexible fabrication of designed optical functional structures at both micro and nano scales remains challenging. Here, a polarization-modulated patterned laser ablation method complemented by flowing liquid is proposed to fabricate hierarchical microgrooves featuring tunable cross-sections and engraved surface nanostructures with controllable periods and orientations. The liquid-assisted ablation counters the shielding effect of ablation debris through laser-induced microjets, ensuring accurate control of the microgroove's shape by modulating the laser pattern in the focal plane. Simultaneously, the absence of debris also permits the consistent formation of laser-induced periodic surface structures (LIPSS) across the microgrooves. The LIPSS's period and orientation can be finely adjusted by manipulating the pulse energy and polarization within the patterned laser spot, facilitating the adaptable creation of hierarchical micro/nanostructures for optical application needs. As a demonstration, blazed gratings featuring orientation-customized LIPSS are fabricated, which exhibit polarization-dependent diffraction efficiency. The laser fabrication technique offers a highly versatile solution for sculpturing shape-controllable hierarchical gratings on hard-to-machine materials, paving the way for the swift production of customized optical elements.

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来源期刊
Advanced Optical Materials
Advanced Optical Materials MATERIALS SCIENCE, MULTIDISCIPLINARY-OPTICS
CiteScore
13.70
自引率
6.70%
发文量
883
审稿时长
1.5 months
期刊介绍: Advanced Optical Materials, part of the esteemed Advanced portfolio, is a unique materials science journal concentrating on all facets of light-matter interactions. For over a decade, it has been the preferred optical materials journal for significant discoveries in photonics, plasmonics, metamaterials, and more. The Advanced portfolio from Wiley is a collection of globally respected, high-impact journals that disseminate the best science from established and emerging researchers, aiding them in fulfilling their mission and amplifying the reach of their scientific discoveries.
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