{"title":"利用光纤激光器制造红外微透镜","authors":"Muaath J. Mahmoud, Bassam G. Rasheed","doi":"10.1080/10420150.2024.2309209","DOIUrl":null,"url":null,"abstract":"In two subsequent stages, various types of silicon microlenses were fabricated. A fiber laser of 1.06 µm was employed to ablate micro dips at the silicon surface and then a mixed acid solution was ...","PeriodicalId":20965,"journal":{"name":"Radiation Effects and Defects in Solids","volume":"6 1","pages":""},"PeriodicalIF":1.1000,"publicationDate":"2024-02-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of IR microlens using a fiber laser\",\"authors\":\"Muaath J. Mahmoud, Bassam G. Rasheed\",\"doi\":\"10.1080/10420150.2024.2309209\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In two subsequent stages, various types of silicon microlenses were fabricated. A fiber laser of 1.06 µm was employed to ablate micro dips at the silicon surface and then a mixed acid solution was ...\",\"PeriodicalId\":20965,\"journal\":{\"name\":\"Radiation Effects and Defects in Solids\",\"volume\":\"6 1\",\"pages\":\"\"},\"PeriodicalIF\":1.1000,\"publicationDate\":\"2024-02-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Radiation Effects and Defects in Solids\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1080/10420150.2024.2309209\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"NUCLEAR SCIENCE & TECHNOLOGY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Radiation Effects and Defects in Solids","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1080/10420150.2024.2309209","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"NUCLEAR SCIENCE & TECHNOLOGY","Score":null,"Total":0}
In two subsequent stages, various types of silicon microlenses were fabricated. A fiber laser of 1.06 µm was employed to ablate micro dips at the silicon surface and then a mixed acid solution was ...
期刊介绍:
The Journal covers a wide range of topics under radiation and plasma sciences. The range of contributions encompasses: radiation physics; radiochemistry, radiobiology and physical effects of medical irradiation, including research on radiative cell degeneration; optical, electrical and mechanical effects of radiation, and their secondary effects such as diffusion and particle emission from surfaces; plasma techniques and plasma phenomena. On plasma science the Journal covers all areas of fusion, space and low temperature plasmas.