Degradation of GaN field emitter arrays induced by O2 exposure

Field emitter arrays (FEAs) have the potential to operate at high frequencies and in harsh environments. However, they have been shown to degrade under oxidizing environments. Studying the effect of O2 on FEAs can help to understand the degradation mechanisms, identify the requirements for vacuum packaging, and estimate the lifetime of the device. In this work, the effect of O2 exposure on 100 × 100 gallium-nitride-field emitter arrays (GaN-FEAs) was studied. The GaN-FEAs were operated at 6 × 10−10 Torr with a 1000 V DC anode voltage and a 50 V DC gate voltage, where the anode current was 1 μA and the gate current was ≤4 nA. The devices were exposed to 10−7, 10−6, and 10−5 Torr of O2 for 100 000 L. The anode current dropped by 50% after 300 L and 98% after 100 000 L. It was observed that the degradation depends on the exposure dose, rather than pressure. The devices mostly degrade when they are ON, confirmed by exposing the device to O2 when the gate voltage was off, and also by the relation between the degradation and duty cycle when pulsing the gate. The results of O2 exposure were compared to Ar exposure to determine whether sputtering and changes in the surface geometry were the primary cause of degradation. The results suggest that changes in the work function and surface chemistry are the cause of emission degradation of GaN-FEA induced by O2.