通过透射电子显微镜探索 TiN 电极在铁电 HfxZr1-xO2 薄膜形成过程中的作用

{"title":"通过透射电子显微镜探索 TiN 电极在铁电 HfxZr1-xO2 薄膜形成过程中的作用","authors":"Sojin Kim, Jaewook Lee, Jong Hyeok Seo, Jinseok Hong, Ji-Hwan Kwon, Min Hyuk Park, Seung-Yong Lee","doi":"10.1007/s43207-023-00361-x","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":502735,"journal":{"name":"Journal of the Korean Ceramic Society","volume":"27 3","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-01-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Exploring the role of TiN electrodes in the formation of ferroelectric HfxZr1-xO2 thin films through transmission electron microscopy\",\"authors\":\"Sojin Kim, Jaewook Lee, Jong Hyeok Seo, Jinseok Hong, Ji-Hwan Kwon, Min Hyuk Park, Seung-Yong Lee\",\"doi\":\"10.1007/s43207-023-00361-x\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":502735,\"journal\":{\"name\":\"Journal of the Korean Ceramic Society\",\"volume\":\"27 3\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of the Korean Ceramic Society\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1007/s43207-023-00361-x\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of the Korean Ceramic Society","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/s43207-023-00361-x","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}