Optical, Mechanical and Electrical Characteristics of Thermal Uncooled Bolometric Type Detector Based on Vanadium Oxide

Determination of optical, mechanical and electrical characteristics is one of the decisive factors in the design of instrumentation structures of thermal uncooled bolometer-type detectors (microbolometers). The paper presents the results of optimization calculations by means of computer simulation of absorption, transmittance and reflection spectra of device structures of microbolometers based on thermosensitive vanadium oxide film by finite-difference time-domain method (FDTD). The characteristics of the investigated microbolometer structure were checked for compliance with mechanical and electrical requirements for this class of devices.