Ming Shi, Weimin Zhang, Ling Wang, Fan Zhang, Jin Hou, Chunyong Yang
{"title":"利用在石英基板上制作的非磁性加热芯片控制原子气室的温度","authors":"Ming Shi, Weimin Zhang, Ling Wang, Fan Zhang, Jin Hou, Chunyong Yang","doi":"10.1051/epjap/2024230162","DOIUrl":null,"url":null,"abstract":"Nonmagnetic electrical heating and temperature sensing chip fabricated on quartz substrate is developed, and a high-precision digital temperature control system is designed based on this chip. The heating resistance and temperature sensing resistance are prepared by depositing two layers of Ti/Pt alloy electrodes on quartz substrate through magnetic field cancellation design. The temperature coefficient of fabricated Ti/Pt temperature sensing resistance is +0.197%/℃. The simulation results show that the residual magnetic field generated by the heating current in the atomic gas chamber closely adjacent to the chip is less than 0.1nT. Temperature control in the range of 100~150℃ is realized, and the temperature stability is about 0.02℃. Due to the high light transmittance of quartz glass, this heating chip has significant advantages for optical integration and miniaturization of atomic magnetometers.","PeriodicalId":301303,"journal":{"name":"The European Physical Journal Applied Physics","volume":"25 9","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2024-01-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Temperature control of atomic gas chamber using a non magnetic heating chip fabricated on quartz substrate\",\"authors\":\"Ming Shi, Weimin Zhang, Ling Wang, Fan Zhang, Jin Hou, Chunyong Yang\",\"doi\":\"10.1051/epjap/2024230162\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Nonmagnetic electrical heating and temperature sensing chip fabricated on quartz substrate is developed, and a high-precision digital temperature control system is designed based on this chip. The heating resistance and temperature sensing resistance are prepared by depositing two layers of Ti/Pt alloy electrodes on quartz substrate through magnetic field cancellation design. The temperature coefficient of fabricated Ti/Pt temperature sensing resistance is +0.197%/℃. The simulation results show that the residual magnetic field generated by the heating current in the atomic gas chamber closely adjacent to the chip is less than 0.1nT. Temperature control in the range of 100~150℃ is realized, and the temperature stability is about 0.02℃. Due to the high light transmittance of quartz glass, this heating chip has significant advantages for optical integration and miniaturization of atomic magnetometers.\",\"PeriodicalId\":301303,\"journal\":{\"name\":\"The European Physical Journal Applied Physics\",\"volume\":\"25 9\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2024-01-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The European Physical Journal Applied Physics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1051/epjap/2024230162\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The European Physical Journal Applied Physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1051/epjap/2024230162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Temperature control of atomic gas chamber using a non magnetic heating chip fabricated on quartz substrate
Nonmagnetic electrical heating and temperature sensing chip fabricated on quartz substrate is developed, and a high-precision digital temperature control system is designed based on this chip. The heating resistance and temperature sensing resistance are prepared by depositing two layers of Ti/Pt alloy electrodes on quartz substrate through magnetic field cancellation design. The temperature coefficient of fabricated Ti/Pt temperature sensing resistance is +0.197%/℃. The simulation results show that the residual magnetic field generated by the heating current in the atomic gas chamber closely adjacent to the chip is less than 0.1nT. Temperature control in the range of 100~150℃ is realized, and the temperature stability is about 0.02℃. Due to the high light transmittance of quartz glass, this heating chip has significant advantages for optical integration and miniaturization of atomic magnetometers.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
