Scalable Large Area Perovskite Solar Cell Modules Fabricated with High Humidity Tolerance by Vacuum Deposition

Vacuum deposition is promising for large-area, high-throughput production of perovskite solar cells (PSCs). However, the strict low humidity control increases the costs for manufacturing facilities and hinders the large-scale production of PSCs. In this work, a sequential deposition method was used to prepare the perovskite intermediate phase, and the impact of ambient humidity was studied during the annealing process. It is shown that proper humidity has a positive effect on the perovskite layer, which is conducive to accelerate the reaction between organic salts and PbI₂ and improve the surface morphology of the film. The perovskite annealing under 55% relative humidity exhibits fewer defects and faster carrier transport kinetics. The resulting PSCs, with all layers fabricated adopting vapor deposition, yield a power conversion efficiency (PCE) of 15.01% for the large area modules of 100 cm² (active area 64.8 cm²). More impressively, the PCE of the unpackaged cell modules remained above 80% after being placed in ambient air for 1200 h. The results open a promising way for scalable fabrication of humidity-tolerant large-area perovskite solar cell modules and shed light on the industrial production of PSCs.