在微波喷射器中激活的 H2 + CH4 + Ar 混合气喷射合成硅基体上的金刚石涂层

IF 0.5 4区工程技术 Q4 MECHANICS

Journal of Applied Mechanics and Technical Physics Pub Date : 2024-01-15 DOI:10.1134/S0021894423050024

A. A. Emelyanov, M. Yu. Plotnilkov, N. I. Timoshenko, I. B. Yudin

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引用次数: 0

摘要

摘要本文介绍了合成金刚石涂层的气体喷射方法的进一步发展，该方法利用高速喷射将微波放电中激活的混合气体（氢气、甲烷和氩气）输送到硅基片上。开发的基片支架可确保基片在化学气相沉积条件下的热负载完整性。本实验中的金刚石合成率高于之前在不添加氩气的微波等离子体辅助化学气相沉积实验中获得的合成率。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE

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GAS-JET SYNTHESIS OF DIAMOND COATINGS ON SILICON SUBSTRATES FROM AN H2 + CH4 + Ar MIXTURE ACTIVATED IN A MICROWAVE DISCHARGE

The paper described further development of a gas-jet method of synthesizing diamond coatings with the use of a high-velocity jet for transporting the gas mixture (hydrogen, methane, and argon) activated in a microwave discharge to a silicon substrate. A substrate holder is developed, which ensures substrate integrity under thermal loading under conditions of chemical vapor deposition. The diamond synthesis rate in the present experiments is higher than that obtained previously in microwave plasma-assisted chemical vapor deposition experiments without addition of argon.

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来源期刊

Journal of Applied Mechanics and Technical Physics 物理-力学

CiteScore

1.20

自引率

16.70%

发文量

审稿时长

4-8 weeks

期刊介绍： Journal of Applied Mechanics and Technical Physics is a journal published in collaboration with the Siberian Branch of the Russian Academy of Sciences. The Journal presents papers on fluid mechanics and applied physics. Each issue contains valuable contributions on hypersonic flows; boundary layer theory; turbulence and hydrodynamic stability; free boundary flows; plasma physics; shock waves; explosives and detonation processes; combustion theory; multiphase flows; heat and mass transfer; composite materials and thermal properties of new materials, plasticity, creep, and failure.