电子束退火条件下电流密度对非晶硅亚氧化物薄膜结构的影响

IF 0.5 4区 工程技术 Q4 MECHANICS
E. A. Baranov, V. A. Nepomnyashchikh, V. O. Konstantinov, V. G. Shchukin, I. E. Merkulova, A. O. Zamchiy, N. A. Lunev, V. A. Volodin, A. A. Shapovalova
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引用次数: 0

摘要

摘要 在真空室中对化学计量系数为 0.5 的无定形亚氧化硅薄膜进行了电子束退火。电子束加速电压为 1000 V,电流强度为 75 mA,曝光时间为 10 分钟。通过探针测量和计算,假定电子束横截面上的电流密度分布为正态分布。束轴上的电流密度为 0.8 mA/mm2。非晶硅亚氧化物薄膜的电子束退火导致了晶体硅纳米颗粒的形成,其尺寸为((4.1\pm 0.1)\)纳米。结晶颗粒的大小与电子束电流密度无关,而结晶度则相反,从束流轴线上的40%下降到外围的零(无定形结构)。这表明在纳米晶硅的形成过程中形成了液相。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

INFLUENCE OF CURRENT DENSITY ON THE STRUCTURE OF AMORPHOUS SILICON SUBOXIDE THIN FILMS UNDER ELECTRON-BEAM ANNEALING

INFLUENCE OF CURRENT DENSITY ON THE STRUCTURE OF AMORPHOUS SILICON SUBOXIDE THIN FILMS UNDER ELECTRON-BEAM ANNEALING

Electron-beam annealing of an amorphous silicon suboxide thin film with a stoichiometric coefficient of 0.5 was carried out in a vacuum chamber. The exposure time was 10 min at an accelerating electron-beam voltage of 1000 V and a current strength of 75 mA. Using probe measurements and calculations, the current density distribution over the electron-beam cross section was obtained assuming a normal distribution. The current density on the beam axis was 0.8 mA/mm2. The electron-beam annealing of the amorphous silicon suboxide thin film led to the formation of crystalline silicon nanoparticles with a size of \((4.1\pm 0.1)\) nm. The crystallite sizes did not depend on the electron-beam current density, in contrast to the degree of crystallinity, which decreased from 40% on the beam axis to zero (amorphous structure) on the periphery. It is suggested that during the formation of nanocrystalline silicon, a liquid phase is formed.

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来源期刊
CiteScore
1.20
自引率
16.70%
发文量
43
审稿时长
4-8 weeks
期刊介绍: Journal of Applied Mechanics and Technical Physics is a journal published in collaboration with the Siberian Branch of the Russian Academy of Sciences. The Journal presents papers on fluid mechanics and applied physics. Each issue contains valuable contributions on hypersonic flows; boundary layer theory; turbulence and hydrodynamic stability; free boundary flows; plasma physics; shock waves; explosives and detonation processes; combustion theory; multiphase flows; heat and mass transfer; composite materials and thermal properties of new materials, plasticity, creep, and failure.
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