用电火花线加工 p 型硅芯片边缘绝缘时的表面质量控制

IF 1 4区材料科学 Q4 INSTRUMENTS & INSTRUMENTATION

Sensors and Materials Pub Date : 2023-11-17 DOI:10.18494/sam4692

Hsin-Min Lee, Ta-Jen Peng, Tzung-Ming Chen, Kang-Feng Peng

引用次数: 0

摘要

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Surface Quality Control of p-type Silicon Chip during Edge Insulation with Wire Electric Dischaarge Machining

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来源期刊

Sensors and Materials 工程技术-材料科学：综合

CiteScore

2.00

自引率

33.30%

发文量

294

审稿时长

3 months

期刊介绍： Sensors and Materials is designed to provide a forum for people working in the multidisciplinary fields of sensing technology, and publishes contributions describing original work in the experimental and theoretical fields, aimed at understanding sensing technology, related materials, associated phenomena, and applied systems. Expository review papers and short notes are also acceptable.