三层微型机电系统对中间液层光学特性的动态敏感性

Physics Pub Date : 2023-11-21 DOI:10.3390/physics5040070
F. Tajik, G. Palasantzas
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引用次数: 0

摘要

在此,我们研究了在卡斯米尔力和耗散流体动力的影响下,致动元件之间有不同液体介质的微型装置的致动动力学。这可以通过相空间肖像来实现,它证明了通过增加中间层的介电响应,自主装置可能不会因为卡斯米尔力大小的减小而发生卡滞。与放置在真空中、中间有液体的微型装置不同,相空间描绘显示的只是一条螺旋轨迹,即使考虑到足够强的恢复力,由于与位置相关的流体动力阻力产生的强大能量消耗,该轨迹最终也会停在静止位置。此外,使用动态粘度较低的中间液体或增加中间液体的滑移长度也可以扩大运动区域。最后,在外部驱动力的影响下(这是可能应用的实际情况),系统可以在较大的分离度下达到稳定振荡,对于导致卡西米尔力和流体动力降低的液体来说,振幅会更大。因此,本研究的结果对于研究微机电系统的动力学行为及其在液体环境中的设计至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dynamical Sensitivity of Three-Layer Micro Electromechanical Systems to the Optical Properties of the Intervening Liquid Layer
Here, we investigate the actuation dynamics of a micro device with different intervening liquids between the actuating components under the influence of Casimir and dissipative hydrodynamic forces. This is enabled via phase space portraits, which demonstrate that by increasing the dielectric response of the intervening layer the autonomous device may not come into stiction due to the decreasing in magnitude Casmir force. Unlike the micro devices that are placed in vacuum with an intervening liquid, the phase portraits show only a spiral trajectory which eventually stops at a rest position due to the strong energy dissipation by the position dependent hydrodynamic drag forces, even when considering sufficiently strong restoring forces. Moreover, it is feasible to expand the area of motion using intervening liquids with lower dynamic viscosity or increasing the slip length of the intervening fluid. Finally, under the influence of an external driven force, which is the realistic case for possible applications, the system can reach stable oscillation at larger separations with an amplitude higher for the liquid that led to lower Casimir and hydrodynamic forces. Hence, the results presented in this study are essential for studying the dynamical behavior of MEMS and their design in liquid environments.
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