介电增强表面改性单点金刚石翻转 Al-6061 多波段反射镜的激光诱导损伤

Laser Damage Pub Date : 2023-11-24 DOI:10.1117/12.2685665
Jue Wang, L. Wamboldt, Ronald W. Davis, Ying Shi, Todd L. Heck, Craig Ungaro, A. B. Ruffin, Michael D. Thomas
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引用次数: 0

摘要

在 1064 nm 和 20 ns 波长下进行了激光诱导损伤阈值(LIDT)测试。结节缺陷被确定为 LIDT 限制因素。结果表明,结节的大小与铝基板表面缺陷的大小有关。采用三维有限差分时域 (FDTD) 仿真来计算种子直径从 0.35 μm 到 2.5 μm 的结节缺陷处的电场强度 (EFI) 增强。EFI 增强与激光诱导损伤形态之间建立了直接联系。使用康宁铝工艺 (CAP) 在表面改性的铝基板上进行了其他 LIDT 测试。表面改性使 LIDT 提高了 10 倍。最后,根据吸收驱动损伤和缺陷驱动损伤预测了多波段反射镜的 LIDT。结果表明,CAP 改性的 Al6061 与介质增强层的低缺陷沉积工艺相结合,可实现较高的激光耐用性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser-induced damage of dielectric-enhanced surface-modified single-point-diamond-turned Al-6061 multiband mirrors
Laser-induced damage threshold (LIDT) tests were performed at 1064 nm and 20 ns. Nodule defects were identified as the LIDT-limiting factor. The results suggest that the scale of the nodules is associated with the size of defects residing on the aluminum substrate surface. 3D finite-difference time-domain (FDTD) simulation was employed to calculate the electric field intensity (EFI) enhancement at the nodular defects with a seed diameter ranging from 0.35 μm to 2.5 μm. A direct linkage between the EFI enhancement and laser-induced damage morphology was established. Additional LIDT tests were conducted on surface modified aluminum substrate by using Corning aluminum process (CAP). The surface modification led to a 10x increase of the LIDT. Finally, LIDT of the multiband mirrors was predicted based on the absorption-driven damage and defect-driven damage. The results suggested that a combination of the CAP-modified Al6061 and low defect deposition process of the dielectric enhanced layers lead to high laser durability.
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