利用 HiPIMS 技术合成的 Ta/TaN 多层次薄膜涂层的表征

Muhammed Alperen Polat, I. Efeoglu, Md Abdul Maleque, Gokhan Gulten, Y. Totik, Masjuki Bin Haji Hassan, Nurin Wahidah Zulkifli
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引用次数: 0

摘要

背景 多级薄膜涂层因其独特的摩擦和磨损特性,在摩擦学应用中具有重要意义。本研究旨在采用高功率脉冲磁控溅射技术,在 AISI 52100 钢上合成并表征 Ta/TaN 多级薄膜涂层。方法 分别使用扫描电子显微镜(SEM)、能量色散 X 射线光谱(EDS)、X 射线衍射分析(XRD)、显微硬度计和针盘测试仪对微观结构、涂层厚度、元素组成、显微硬度和摩擦学性能进行研究。结果 在系统研究的基础上,由于多级涂层在基体上表现出更高的附着力,摩擦系数明显降低。结论 总体研究结果凸显了多级分化 Ta/TaN 薄膜涂层在摩擦学应用领域的潜在适用性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of Ta/TaN multi-graded thin film coating synthesized by HiPIMS technique
Background The significance of multi-graded thin film coatings finds its devastating relevance in tribological applications due to their unique properties of friction and wear. This research aims to synthesize and characterize the multi-graded Ta/TaN thin film coatings on AISI 52100 steel, employing the high-power impulse magnetron sputtering technique. Methods The investigation includes the microstructure, coating thickness, elemental composition, microhardness, and tribological performance using scanning electron microscope (SEM), energy-dispersive x-ray spectroscopy (EDS), x-Ray diffraction analysis (XRD), microhardness tester, and pin-on-disc tester, respectively. Results Based on this systematic study, a noticeable reduction in the coefficient of friction was obtained due to the improved adhesion value exhibited by the multi-graded coating on the substrate. Conclusions The overall findings highlight the potential suitability of the multi-graded Ta/TaN thin film coating within the field of tribological applications.
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