通过氮化硅光栅耦合器实现高效且容差的芯片间光耦合

Jinghao Wang, Zhen Wang, Chen Hu, Huan Zhang, Kun Yin, Haitao Wang
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引用次数: 0

摘要

我们提出并研究了一种采用氮化硅光栅耦合器的高效、容差芯片到芯片光耦合方法。在使用 50 μm 的光栅长度时,峰值耦合损耗为 -0.28 dB,沿 x 轴的 1-dB 校准容差达到 25.4 μm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Efficient and tolerant chip-to-chip optical coupling via silicon nitride grating couplers
An efficient and tolerant chip-to-chip optical coupling approach employing silicon nitride grating couplers was proposed and investigated. The integration of bottom mirrors and the strategic extension of grating length led to notable results, with a peak coupling loss of -0.28 dB and a 1-dB alignment tolerance along the x-axis reaching 25.4 μm when using a grating length of 50 μm.
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