适用于铌酸锂薄膜的兼容不同模式场的高效模式转换器

Jinlong Lu, Ting Hao, Zhihao Li, Dennis Zhou, Guijun Ji, Xinglong Wang
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引用次数: 0

摘要

我们设计了一种基于与 SiN 相似折射率的填充材料,作为铌酸锂薄膜(TFLN)的模式转换器。这种设计可以实现与 3.5 um-9.2 um 不同尺寸兼容的输出模式场。采用 SiN 的双层模式转换器核心与 TFLN 的脊波导高度相似,这有助于提高转换效率。理论上,在 1310 nm 波长处,两种模式的整体耦合损耗均小于 0.6 dB。所提出的方案避免了直接使用干蚀刻产生的倾斜 TFLN 截面作为耦合端面时反射率高的缺点,可以提高芯片级集成 TFLN 光电调制的性能。三维仿真结果表明,所设计的结构对制造公差不敏感,为减小集成器件体积、提高整体性能和高密度集成提供了可行的解决方案。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High-efficiency mode converters compatible with different mode fields for thin film lithium niobate
A filling material based on a similar refractive index with SiN is designed as the mode converter for thin film lithium niobate (TFLN). Such a design can realize an output mode field compatible with different sizes ranging from 3.5 um-9.2 um. The double-layer mode converter core with SiN has a similar height as the ridge waveguide of TFLN, which is helpful to increase the conversion efficiency. An overall coupling loss of less than 0.6 dB was achieved theoretically at 1310 nm for both modes. The proposed scheme avoids the disadvantage of high reflection when the inclined TFLN section result from dry-etching is directly used as the coupling end face and can improve the performance of integrated TFLN electro-optic modulation on the chip level. Three-dimensional simulation results show that the designed structure is insensitive to fabrication tolerance, which provides a feasible solution for reducing the volume of integrated devices, increasing overall performance and high-density integration.
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