Simulation of display thermal deformation and error analysis in high precision reverse Hartmann test

In reverse Hartmann measurement, the display often undergoes thermal deformation due to self-heating, which can cause drift of pixels on the screen and cause errors in the measurement results. A multilayer LCD model was established based on a linear elastic material model, and the influence of thermal deformation of the display on measurement results was analyzed under different backlighting modes. The results show that when uniformly heated, the PV value increases by 40 nm for each degree of temperature increase in the display, and the main surface errors are tilt and astigmatism under different temperature fields.