以 CVD 封装金刚石电子光学器件中的激光图形化电极

IF 2.1 4区物理与天体物理 Q2 OPTICS

Photonics Pub Date : 2023-12-23 DOI:10.3390/photonics11010010

M. Komlenok, Vitali Kononenko, Andrey P. Bolshakov, Nikolay D. Kurochitskiy, D. Pasternak, Alexander A. Ushakov, Vitaly Konov

{"title":"以 CVD 封装金刚石电子光学器件中的激光图形化电极","authors":"M. Komlenok, Vitali Kononenko, Andrey P. Bolshakov, Nikolay D. Kurochitskiy, D. Pasternak, Alexander A. Ushakov, Vitaly Konov","doi":"10.3390/photonics11010010","DOIUrl":null,"url":null,"abstract":"Conductive graphitized grooves on the dielectric surface of diamond have been created by KrF excimer laser radiation. The advantages of such a circuit board in high-field applications is rather limited because the crystal surface has a relatively low electrical breakdown threshold. To increase the electrical strength, a method of encapsulating surface conductive graphitized structures by chemical vapor deposition of an epitaxial diamond layer has been proposed and realized. The quality of the growth diamond is proved by Raman spectroscopy. A comparative study of the electrical resistivity of graphitized wires and the breakdown fields between them before and after diamond growth was carried out. The proposed technique is crucial for diamond-based high-field electro-optical devices, such as THz photoconductive emitters.","PeriodicalId":20154,"journal":{"name":"Photonics","volume":"13 3","pages":""},"PeriodicalIF":2.1000,"publicationDate":"2023-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"CVD Encapsulation of Laser-Graphitized Electrodes in Diamond Electro-Optical Devices\",\"authors\":\"M. Komlenok, Vitali Kononenko, Andrey P. Bolshakov, Nikolay D. Kurochitskiy, D. Pasternak, Alexander A. Ushakov, Vitaly Konov\",\"doi\":\"10.3390/photonics11010010\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Conductive graphitized grooves on the dielectric surface of diamond have been created by KrF excimer laser radiation. The advantages of such a circuit board in high-field applications is rather limited because the crystal surface has a relatively low electrical breakdown threshold. To increase the electrical strength, a method of encapsulating surface conductive graphitized structures by chemical vapor deposition of an epitaxial diamond layer has been proposed and realized. The quality of the growth diamond is proved by Raman spectroscopy. A comparative study of the electrical resistivity of graphitized wires and the breakdown fields between them before and after diamond growth was carried out. The proposed technique is crucial for diamond-based high-field electro-optical devices, such as THz photoconductive emitters.\",\"PeriodicalId\":20154,\"journal\":{\"name\":\"Photonics\",\"volume\":\"13 3\",\"pages\":\"\"},\"PeriodicalIF\":2.1000,\"publicationDate\":\"2023-12-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.3390/photonics11010010\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.3390/photonics11010010","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 0

摘要

通过 KrF 准分子激光辐射，在金刚石介电质表面形成了导电石墨化沟槽。由于晶体表面的电击穿阈值相对较低，这种电路板在高场应用中的优势相当有限。为了提高电气强度，有人提出并实现了一种通过化学气相沉积外延金刚石层来封装表面导电石墨化结构的方法。拉曼光谱证明了生长金刚石的质量。对金刚石生长前后石墨化导线的电阻率和它们之间的击穿场进行了比较研究。所提出的技术对于太赫兹光电导发射器等基于金刚石的高场电光设备至关重要。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

CVD Encapsulation of Laser-Graphitized Electrodes in Diamond Electro-Optical Devices

Conductive graphitized grooves on the dielectric surface of diamond have been created by KrF excimer laser radiation. The advantages of such a circuit board in high-field applications is rather limited because the crystal surface has a relatively low electrical breakdown threshold. To increase the electrical strength, a method of encapsulating surface conductive graphitized structures by chemical vapor deposition of an epitaxial diamond layer has been proposed and realized. The quality of the growth diamond is proved by Raman spectroscopy. A comparative study of the electrical resistivity of graphitized wires and the breakdown fields between them before and after diamond growth was carried out. The proposed technique is crucial for diamond-based high-field electro-optical devices, such as THz photoconductive emitters.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Photonics Physics and Astronomy-Instrumentation

CiteScore

2.60

自引率

20.80%

发文量

817

审稿时长

8 weeks

期刊介绍： Photonics (ISSN 2304-6732) aims at a fast turn around time for peer-reviewing manuscripts and producing accepted articles. The online-only and open access nature of the journal will allow for a speedy and wide circulation of your research as well as review articles. We aim at establishing Photonics as a leading venue for publishing high impact fundamental research but also applications of optics and photonics. The journal particularly welcomes both theoretical (simulation) and experimental research. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Electronic files and software regarding the full details of the calculation and experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material.