掺铜对二氧化钛纳米薄膜某些结构和电学特性的影响

Mohammad Adil Razooqi, Z. Majeed
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摘要

使用脉冲激光沉积(PLD)技术在玻璃基底上沉积了含有多种铜比例的二氧化钛(TiO2)薄膜,包括纯样品和掺杂样品(纯 TiO2、1 % Cu、2 % Cu 和 3 % Cu),能量(600 mJ)和频率(6 Hz)。 X 射线衍射 (XRD) 显示,随着铜掺杂比例的增加,峰宽减小。这导致晶体尺寸和铜峰强度的增加,以及二氧化钛峰强度的逐渐降低。原子力显微镜的结果表明,接种比例的增加会导致表面粗糙度和平均晶粒直径的增加,从而导致粒径的增大。电学测试(霍尔效应)表明,制备的薄膜属于(n 型),载流子浓度(n)随掺杂率的增加而增加,而迁移率值(μH)则随铜的增加而直接降低。电导率(直流)测试表明,随着铜掺杂比例的增加,活化能也随之增加,因此电导率也随之增加。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Effect of Copper Doping on Some Structural and Electrical Properties of Titanium Dioxide Nanofilms
Thin films of titanium dioxide (TiO2) with several copper ratios were deposited on glass substrates using pulsed laser deposition (PLD) for pure and doped samples (TiO2 Pure, 1 % Cu, 2 % Cu, and 3 % Cu), energy (600 mJ), and frequency (6 Hz).  X-ray diffraction (XRD) showed that the width of the peaks decreases with increasing the ratio of doping with copper. This leads to an increase in the crystal size and in the intensity of the copper peaks, as well as a gradual decrease in the intensity of the titanium dioxide peaks. The results of the atomic force microscope showed that increasing the inoculation percentage leads to an increase in the surface roughness and the average grain diameter, and thus an increase in the growth of the particle size. The electrical tests (Hall effect) showed that the prepared films are of (n-type) and that the concentration of carriers (n) increased with the doping ratio, while the mobility values ​​(µH) decreased directly with the increase in copper. The electrical conductivity (DC) test showed an increase in the activation energy as a result of the increase in the copper inoculation percentage and thus the electrical conductivity increases.
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