The mass production of silicon sensors for the Phase-2 CMS Outer Tracker

The high luminosity upgrade of the Large Hadron Collider (HL-LHC) will create a more challenging and demanding environment for the operation of the CMS detector. The peak instantaneous luminosity of the HL-LHC machine will reach 5–7 × 1034 cm-2s-1, which by the end of its lifetime will have delivered up to 4000 fb-1. To cope with these conditions the CMS Tracker will be fully replaced with a more advanced system. The new sub-detector is divided into an Outer Tracker, instrumented by short strips and macro pixels, and a more granular Inner Tracker using pixelated sensors. This report will describe some features of the new Outer Tracker silicon sensors and modules, provide results indicating the quality of the sensors produced to date, as well as the robustness of the sensors against environmental factors such as relative humidity.