Shining Xu, Shuqi Zhang, J. Kirch, Cheng Liu, A. Wibowo, S. R. Tatavarti, D. Botez, L. Mawst
{"title":"在表面粗糙度较大的外来基底上通过金属有机化学气相沉积法生长量子级联激光器","authors":"Shining Xu, Shuqi Zhang, J. Kirch, Cheng Liu, A. Wibowo, S. R. Tatavarti, D. Botez, L. Mawst","doi":"10.3390/photonics10121377","DOIUrl":null,"url":null,"abstract":"The surface morphology of a buffer template is an important factor in the heteroepitaxial integration of optoelectronic devices with a significant lattice mismatch. In this work, InP-based long-wave infrared (~8 µm) emitting quantum cascade lasers with active region designs lattice-matched to InP were grown on GaAs and Si substrates employing InAlGaAs step-graded metamorphic buffer layers, as a means to assess the impact of surface roughness on device performance. A room-temperature pulsed-operation lasing with a relatively good device performance was obtained on a Si template, even with a large RMS roughness of 17.1 nm over 100 µm2. Such results demonstrate that intersubband-operating devices are highly tolerant to large RMS surface roughness, even in the presence of a high residual dislocation density.","PeriodicalId":20154,"journal":{"name":"Photonics","volume":"31 12","pages":""},"PeriodicalIF":2.1000,"publicationDate":"2023-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Quantum Cascade Lasers Grown by Metalorganic Chemical Vapor Deposition on Foreign Substrates with Large Surface Roughness\",\"authors\":\"Shining Xu, Shuqi Zhang, J. Kirch, Cheng Liu, A. Wibowo, S. R. Tatavarti, D. Botez, L. Mawst\",\"doi\":\"10.3390/photonics10121377\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The surface morphology of a buffer template is an important factor in the heteroepitaxial integration of optoelectronic devices with a significant lattice mismatch. In this work, InP-based long-wave infrared (~8 µm) emitting quantum cascade lasers with active region designs lattice-matched to InP were grown on GaAs and Si substrates employing InAlGaAs step-graded metamorphic buffer layers, as a means to assess the impact of surface roughness on device performance. A room-temperature pulsed-operation lasing with a relatively good device performance was obtained on a Si template, even with a large RMS roughness of 17.1 nm over 100 µm2. Such results demonstrate that intersubband-operating devices are highly tolerant to large RMS surface roughness, even in the presence of a high residual dislocation density.\",\"PeriodicalId\":20154,\"journal\":{\"name\":\"Photonics\",\"volume\":\"31 12\",\"pages\":\"\"},\"PeriodicalIF\":2.1000,\"publicationDate\":\"2023-12-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Photonics\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.3390/photonics10121377\",\"RegionNum\":4,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photonics","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.3390/photonics10121377","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
Quantum Cascade Lasers Grown by Metalorganic Chemical Vapor Deposition on Foreign Substrates with Large Surface Roughness
The surface morphology of a buffer template is an important factor in the heteroepitaxial integration of optoelectronic devices with a significant lattice mismatch. In this work, InP-based long-wave infrared (~8 µm) emitting quantum cascade lasers with active region designs lattice-matched to InP were grown on GaAs and Si substrates employing InAlGaAs step-graded metamorphic buffer layers, as a means to assess the impact of surface roughness on device performance. A room-temperature pulsed-operation lasing with a relatively good device performance was obtained on a Si template, even with a large RMS roughness of 17.1 nm over 100 µm2. Such results demonstrate that intersubband-operating devices are highly tolerant to large RMS surface roughness, even in the presence of a high residual dislocation density.
期刊介绍:
Photonics (ISSN 2304-6732) aims at a fast turn around time for peer-reviewing manuscripts and producing accepted articles. The online-only and open access nature of the journal will allow for a speedy and wide circulation of your research as well as review articles. We aim at establishing Photonics as a leading venue for publishing high impact fundamental research but also applications of optics and photonics. The journal particularly welcomes both theoretical (simulation) and experimental research. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced. Electronic files and software regarding the full details of the calculation and experimental procedure, if unable to be published in a normal way, can be deposited as supplementary material.