多成分合金涂层对高频等离子烧蚀金刚石薄膜的影响

Dexian Pan, Kesheng Guo, Liping Liu, Senjie Zheng, Bin He, Lang Hu, Qiang Hu
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摘要

金刚石薄膜具有从紫外线到远红外线的优异透射率,以及出色的抗激光损伤、机械、灰尘、雨水等特性。因此,金刚石薄膜被用于飞机的红外窗口和超音速飞行导弹的防护罩。超音速飞机表面在强烈的气动加热下会产生等离子烧蚀。表面的高温气体具有强烈的振动、离解和电离作用,导致飞机外表面的光学窗口和保护罩产生许多缺陷,可能导致光学性能下降。本论文采用微波等离子体化学气相沉积(MPCVD)方法,利用高纯气体合成高质量金刚石薄膜,同时利用磁控溅射沉积多组分合金涂层作为保护层,研究金刚石薄膜的高频等离子体烧蚀效应。利用拉曼光谱、可见-红外透射光谱和场发射扫描电子显微镜分析了高频等离子体烧蚀前后金刚石薄膜的光谱。研究发现,多组分合金镀膜具有良好的抗烧蚀性,在 1~4μm 波长范围内具有较高的透射率,而碳和合金成分仍残留在薄膜表面。这项研究有助于促进金刚石薄膜在超音速飞行中的应用,并为飞机外表面材料的设计提供数据参考。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of multicomponent alloy coating on high frequency plasma ablation of diamond films
Diamond films have excellent transmittance from ultraviolet to far infrared, as well as excellent resistance to laser damage, mechanics, dust, rain, and other characteristics. Therefore, diamond films are used in aircraft infrared windows and supersonic flight missile hoods. The surface of supersonic aircraft can cause plasma ablation under intense aerodynamic heating. High temperature gas on the surface has strong vibration, dissociation, and ionization, resulting in many defects in the optical windows and protective covers on the outer surface of the aircraft, which may lead to deterioration of optical performance. In this thesis, microwave plasma chemical vapor deposition (MPCVD) method was used to synthesize high-quality diamond films using high-purity gas, while using magnetron sputtering to deposit multicomponent alloy coating as a protective layer to study the high-frequency plasma ablation effect of diamond films. Raman spectroscopy, visible-infrared transmittance spectra and field emission scanning electron microscopy was used to analyze the spectrum of diamond films before and after high-frequency plasma ablation. It was found that the multicomponent alloy coatings have good ablation resistance and high transmittance in the 1~4μm wavelength range, while the carbon and alloying components remain on the film surface. This research contributes to promoting the supersonic flight application of diamond films and provides data reference for the design of aircraft outer surface materials.
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