用于超紫外辐射源研究的锡滴靶系统的特性

IF 2.7 3区工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY

Measurement Science and Technology Pub Date : 2023-12-21 DOI:10.1088/1361-6501/ad1810

Qin Sun, Xinbing Wang, D. Zuo

{"title":"用于超紫外辐射源研究的锡滴靶系统的特性","authors":"Qin Sun, Xinbing Wang, D. Zuo","doi":"10.1088/1361-6501/ad1810","DOIUrl":null,"url":null,"abstract":"\n Droplet-based laser-produced plasma source shows enormous significance in extreme ultraviolet lithography, which places high demands on the stability of tin droplets. This paper presents a tin droplet target system including the tin droplet generator (DG), droplet diagnosis, and spatiotemporal synchronization of tin droplets and laser. Shadowgraph technology is used to determine the stability of tin droplets. The characteristics of the DG were analyzed, and the operation parameter maps are provided. By varying operating frequencies from 18.4 kHz to 49.3 kHz, the diameter and spacing of droplets can be adjusted in the ranges of 120~200 μm and 200~1100 μm respectively. Both theoretical calculations and experimental results show that tin droplets keep high stability when the operation parameters locate at the optimal range. The long-term lateral stability is also proven under a high degree of vacuum. Additionally, the application feasibility of the DG system is verified by the experiments of laser impact tin droplets.","PeriodicalId":18526,"journal":{"name":"Measurement Science and Technology","volume":"2 3","pages":""},"PeriodicalIF":2.7000,"publicationDate":"2023-12-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Characteristics of tin droplet target system for EUV source research\",\"authors\":\"Qin Sun, Xinbing Wang, D. Zuo\",\"doi\":\"10.1088/1361-6501/ad1810\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\\n Droplet-based laser-produced plasma source shows enormous significance in extreme ultraviolet lithography, which places high demands on the stability of tin droplets. This paper presents a tin droplet target system including the tin droplet generator (DG), droplet diagnosis, and spatiotemporal synchronization of tin droplets and laser. Shadowgraph technology is used to determine the stability of tin droplets. The characteristics of the DG were analyzed, and the operation parameter maps are provided. By varying operating frequencies from 18.4 kHz to 49.3 kHz, the diameter and spacing of droplets can be adjusted in the ranges of 120~200 μm and 200~1100 μm respectively. Both theoretical calculations and experimental results show that tin droplets keep high stability when the operation parameters locate at the optimal range. The long-term lateral stability is also proven under a high degree of vacuum. Additionally, the application feasibility of the DG system is verified by the experiments of laser impact tin droplets.\",\"PeriodicalId\":18526,\"journal\":{\"name\":\"Measurement Science and Technology\",\"volume\":\"2 3\",\"pages\":\"\"},\"PeriodicalIF\":2.7000,\"publicationDate\":\"2023-12-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Measurement Science and Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1088/1361-6501/ad1810\",\"RegionNum\":3,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Measurement Science and Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1088/1361-6501/ad1810","RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, MULTIDISCIPLINARY","Score":null,"Total":0}

引用次数: 0

摘要

基于液滴的激光产生的等离子体源在极紫外光刻技术中具有重要意义，这对锡滴的稳定性提出了很高的要求。本文介绍了一种锡液滴靶系统，包括锡液滴发生器（DG）、液滴诊断以及锡液滴和激光的时空同步。采用阴影图技术确定锡滴的稳定性。对 DG 的特性进行了分析，并提供了运行参数图。通过改变 18.4 kHz 至 49.3 kHz 的工作频率，锡滴的直径和间距可分别在 120 至 200 μm 和 200 至 1100 μm 的范围内调整。理论计算和实验结果都表明，当操作参数处于最佳范围时，锡滴能保持较高的稳定性。在高真空条件下，锡滴的长期横向稳定性也得到了证实。此外，激光冲击锡滴的实验也验证了 DG 系统的应用可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Characteristics of tin droplet target system for EUV source research

Droplet-based laser-produced plasma source shows enormous significance in extreme ultraviolet lithography, which places high demands on the stability of tin droplets. This paper presents a tin droplet target system including the tin droplet generator (DG), droplet diagnosis, and spatiotemporal synchronization of tin droplets and laser. Shadowgraph technology is used to determine the stability of tin droplets. The characteristics of the DG were analyzed, and the operation parameter maps are provided. By varying operating frequencies from 18.4 kHz to 49.3 kHz, the diameter and spacing of droplets can be adjusted in the ranges of 120~200 μm and 200~1100 μm respectively. Both theoretical calculations and experimental results show that tin droplets keep high stability when the operation parameters locate at the optimal range. The long-term lateral stability is also proven under a high degree of vacuum. Additionally, the application feasibility of the DG system is verified by the experiments of laser impact tin droplets.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Measurement Science and Technology 工程技术-工程：综合

CiteScore

4.30

自引率

16.70%

发文量

656

审稿时长

4.9 months

期刊介绍： Measurement Science and Technology publishes articles on new measurement techniques and associated instrumentation. Papers that describe experiments must represent an advance in measurement science or measurement technique rather than the application of established experimental technique. Bearing in mind the multidisciplinary nature of the journal, authors must provide an introduction to their work that makes clear the novelty, significance, broader relevance of their work in a measurement context and relevance to the readership of Measurement Science and Technology. All submitted articles should contain consideration of the uncertainty, precision and/or accuracy of the measurements presented. Subject coverage includes the theory, practice and application of measurement in physics, chemistry, engineering and the environmental and life sciences from inception to commercial exploitation. Publications in the journal should emphasize the novelty of reported methods, characterize them and demonstrate their performance using examples or applications.