过渡金属氮化物和硼化物薄膜的结构特征及其对性能的影响(概述)

IF 0.9 4区 材料科学 Q3 MATERIALS SCIENCE, CERAMICS
O. A. Goncharov, I. S. Kolinko, G. V. Kornich, O. V. Khomenko, D. V. Shyrokorad
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引用次数: 0

摘要

超高温陶瓷(UHTC)应用广泛,尤其是在超音速飞行器中。然而,生产具有预定机械参数的超高温陶瓷具有现实意义。本文分析了离子等离子体和磁控溅射方法合成的过渡金属氮化物和硼化物薄膜涂层的结构化趋势及其对涂层性能的影响。在最佳沉积能量条件下,薄膜的形成呈现出一般规律性,如柱状(纤维状)结构和生长纹理。根据沉积参数和方法的不同,平均晶粒大小从 18-20 纳米到 60-80 纳米不等。薄膜具有优异的机械性能,包括硬度、弹性模量、负载下的可恢复弹性指标等。过渡金属碳化物和氮化物涂层的生长方向为<111>和<100>,而过渡金属二硼化物的典型生长方向为<0001>。根据已确定的趋势,可以利用预先确定的薄膜特性和最佳溅射参数对薄膜形成过程进行现实的计算机建模,以促进表面的优异机械特性。我们提出了一个热力学模型,描述了在原子随机沉积到基底上的环境中典型薄膜的原子核形成过程。对原子核生长的临界半径以及相应的薄膜结晶的临界半径进行了分析估算。该模型讨论了吉布斯能变化对结晶过程的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Structural Characteristics and Their Influence on the Properties of Transition Metal Nitride and Boride Films (Overview)

Structural Characteristics and Their Influence on the Properties of Transition Metal Nitride and Boride Films (Overview)

Structural Characteristics and Their Influence on the Properties of Transition Metal Nitride and Boride Films (Overview)

Ultrahigh-temperature ceramics (UHTC) have a wide range of applications, particularly in supersonic aircraft vehicles. However, the production of UHTCs with predetermined mechanical parameters is relevant. The paper analyzes the structurization trends and their influence on the properties of film coatings from transition metal nitrides and borides synthesized by ion-plasma and magnetron sputtering methods. Under optimal deposition energy conditions, the films show general regularities in their formation, such as the presence of a columnar (fibrous) structure and growth texture. The average grain size varies from 18–20 nm to 60–80 nm, depending on the deposition parameters and method. The films demonstrate excellent mechanical properties, including hardness, elastic modulus, recoverable elastic indicators under load, etc. Growth directions <111> and <100> are observed for transition metal carbide and nitride coatings, while growth in direction <0001> is typical of transition metal diborides. The identified trends will allow realistic computer modeling of the film formation process, using predetermined film properties and optimal sputtering parameters to promote excellent mechanical characteristics of the surface. A thermodynamic model describing the formation of nuclei for a typical film in the environment of atoms randomly deposited onto the substrate is proposed. The critical radius for nucleus growth and, accordingly, for film crystallization is analytically estimated. The influence of Gibbs energy changes on the crystallization process is discussed within the model.

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来源期刊
Powder Metallurgy and Metal Ceramics
Powder Metallurgy and Metal Ceramics 工程技术-材料科学:硅酸盐
CiteScore
1.90
自引率
20.00%
发文量
43
审稿时长
6-12 weeks
期刊介绍: Powder Metallurgy and Metal Ceramics covers topics of the theory, manufacturing technology, and properties of powder; technology of forming processes; the technology of sintering, heat treatment, and thermo-chemical treatment; properties of sintered materials; and testing methods.
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