Dual Stepped Gate Vertical Double Diffused MOSFET Technology with Enhanced Device Performance

In this paper, Vertical Double Diffused MOSFET(VDMOS) with improved device structure is proposed. Gate engineering is applied in the proposed device and two devices namely dual stepped gate technology(DSGT) and modified dual stepped gate technology(m‐DSGT) are proposed here. Due to the effect of gate engineering switching ability is improved and area specific ON‐resistance is reduced. Devices are simulated using Silvaco Atlas software. Breakdown voltages for conventional and m‐DSGT are 278.63V and 280.02V, respectively, for VGS=0V. The current density of conventional and m‐DSGT devices is 49.2A/cm2 and 178.5A/cm2 under the conditions on gate drive voltage of 1V for VDS=10V. Using 2‐D numerical simulations, the electrical performance of both DSGT and m‐DSGT devices is examined. The results demonstrate 76.6% decrease in specific ON‐resistance, 4.22 times increase in current density and 26.67% faster switching speed compared to conventional VDMOS. Thus, improving the device performance.This article is protected by copyright. All rights reserved.