具有强 Duffing 非线性的微型机械谐振器中的一对二内部共振

IF 2.4 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC
Jun Yu, Ata Donmez, Hansaja Herath, Hanna Cho
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引用次数: 0

摘要

本文研究了在具有强烈达芬效应的钳夹式阶梯梁谐振器中实现 1:2 内部共振(InRes)的问题,重点关注其在微机电系统(MEMS)谐振器中稳定频率的潜力。在非线性系统中,模态频率接近整数比时就会产生 InRes,从而促进外部驱动模态与非驱动模态之间的内部能量交换。1:2 InRes 和 Duffing硬化非线性的存在会导致频率饱和现象,从而形成平坦的振幅-频率响应范围,这也是频率稳定的基础。阶梯梁谐振器设计与热频率调谐相结合,可以精确改变第二和第三挠曲模式之间的频率比,从而实现所需的 1:2 InRes 比。实验表征和理论分析表明,频率失配起着重要作用,失配条件越大,能量交换越强,频率饱和的驱动力范围越广。这项研究突出了利用 1:2 InRes 的频率饱和机制,强调了 Duffing 非线性和更大的模式间频率失配在更广泛的频率稳定方面的优势,为 MEMS 谐振器的设计和优化提供了宝贵的见解。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity
This paper investigates the implementation of 1:2 internal resonance (InRes) in a clamped–clamped stepped beam resonator with a strong Duffing effect, focusing on its potential for frequency stabilization in micro-electro-mechanical systems (MEMS) resonators. InRes can arise in a nonlinear system of which mode frequencies are close to an integer ratio, facilitating the internal exchange of energy from an externally driven mode to an undriven mode. The presence of 1:2 InRes and Duffing hardening nonlinearity can result in frequency saturation phenomena, leading to a flat amplitude-frequency response range, which forms the basis for frequency stabilization. The stepped beam resonator design, combined with thermal frequency tuning, enables precise alteration of the frequency ratio between the second and third flexural modes required to achieve the desired 1:2 ratio for InRes. Experimental characterization and theoretical analysis revealed that frequency mismatch plays a significant role, with larger mismatch conditions leading to stronger energy exchange and a wider range of drive force for frequency saturation. The study highlights the frequency saturation mechanism utilizing 1:2 InRes and emphasizes the advantage of Duffing nonlinearity and larger intermodal frequency mismatch for broader frequency stabilization, providing valuable insights for the design and optimization of MEMS resonators.
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来源期刊
Journal of Micromechanics and Microengineering
Journal of Micromechanics and Microengineering 工程技术-材料科学:综合
CiteScore
4.50
自引率
4.30%
发文量
136
审稿时长
2.8 months
期刊介绍: Journal of Micromechanics and Microengineering (JMM) primarily covers experimental work, however relevant modelling papers are considered where supported by experimental data. The journal is focussed on all aspects of: -nano- and micro- mechanical systems -nano- and micro- electomechanical systems -nano- and micro- electrical and mechatronic systems -nano- and micro- engineering -nano- and micro- scale science Please note that we do not publish materials papers with no obvious application or link to nano- or micro-engineering. Below are some examples of the topics that are included within the scope of the journal: -MEMS and NEMS: Including sensors, optical MEMS/NEMS, RF MEMS/NEMS, etc. -Fabrication techniques and manufacturing: Including micromachining, etching, lithography, deposition, patterning, self-assembly, 3d printing, inkjet printing. -Packaging and Integration technologies. -Materials, testing, and reliability. -Micro- and nano-fluidics: Including optofluidics, acoustofluidics, droplets, microreactors, organ-on-a-chip. -Lab-on-a-chip and micro- and nano-total analysis systems. -Biomedical systems and devices: Including bio MEMS, biosensors, assays, organ-on-a-chip, drug delivery, cells, biointerfaces. -Energy and power: Including power MEMS/NEMS, energy harvesters, actuators, microbatteries. -Electronics: Including flexible electronics, wearable electronics, interface electronics. -Optical systems. -Robotics.
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