D. V. Kolodko, A. V. Kaziev, D. G. Ageichenkov, V. Yu. Lisenkov
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Flux of High-Energy Positive Oxygen Ions from Plasma to a Substrate in a Pulsed Magnetron Discharge with a Hot Target
Abstract
A group of high-energy positive O+ ions in a plasma flow from a high-current pulsed magnetron discharge with a hot target in an Ar/O2 gas mixture. The mechanism of occurrence of accelerated O+ ions is the conversion of negative ions accelerated in the cathode layer O– → O+ in the processes of charge exchange or ionization by electron impact.
期刊介绍:
Journal of Communications Technology and Electronics is a journal that publishes articles on a broad spectrum of theoretical, fundamental, and applied issues of radio engineering, communication, and electron physics. It publishes original articles from the leading scientific and research centers. The journal covers all essential branches of electromagnetics, wave propagation theory, signal processing, transmission lines, telecommunications, physics of semiconductors, and physical processes in electron devices, as well as applications in biology, medicine, microelectronics, nanoelectronics, electron and ion emission, etc.