用于生物医学应用中精密纳米结构制造的光刻技术进展

IF 4.703 3区 材料科学
Kate Stokes, Kieran Clark, David Odetade, Mike Hardy, Pola Goldberg Oppenheimer
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引用次数: 0

摘要

纳米制造技术在技术革新中发挥着至关重要的作用。然而,低通量、高成本和固有的分辨率限制构成了重大限制,因此,继续改进现有方法并开发新技术以克服这些挑战至关重要。这一点尤其适用于生物医学研究领域,该领域的重点是传感,越来越多地在护理点进行传感,以此改善患者的治疗效果。在此背景下,本综述将重点介绍主要新兴图案化方法的最新进展,包括双光子、立体、电流体动力、近场电纺丝辅助、磁、磁流变拉伸、纳米压印、毛细管力、纳米圈、边缘、纳米转移印刷和用于微米和纳米制造的嵌段共聚物光刻技术。新出现的结构和化学纳米制造方法与未来的化学和物理图案技术一起进行了分类。简要概述了成熟的光刻技术,并将新型光刻技术与这些技术进行了比较,总结了这些技术的具体优势和不足,以及目前的横向分辨率限制和大规模生产的适应性,并从工艺可扩展性和成本方面进行了评估。报告特别关注了潜在的突破性应用领域,主要是生物医学研究领域,为采用替代性发展中光刻技术或将其与现有图案技术相结合的具体途径奠定了平台,这取决于最终用户的需求,例如对固有限制、保真度和可重复性的容忍度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications

Nano-fabrication techniques have demonstrated their vital importance in technological innovation. However, low-throughput, high-cost and intrinsic resolution limits pose significant restrictions, it is, therefore, paramount to continue improving existing methods as well as developing new techniques to overcome these challenges. This is particularly applicable within the area of biomedical research, which focuses on sensing, increasingly at the point-of-care, as a way to improve patient outcomes. Within this context, this review focuses on the latest advances in the main emerging patterning methods including the two-photon, stereo, electrohydrodynamic, near-field electrospinning-assisted, magneto, magnetorheological drawing, nanoimprint, capillary force, nanosphere, edge, nano transfer printing and block copolymer lithographic technologies for micro- and nanofabrication. Emerging methods enabling structural and chemical nano fabrication are categorised along with prospective chemical and physical patterning techniques. Established lithographic techniques are briefly outlined and the novel lithographic technologies are compared to these, summarising the specific advantages and shortfalls alongside the current lateral resolution limits and the amenability to mass production, evaluated in terms of process scalability and cost. Particular attention is drawn to the potential breakthrough application areas, predominantly within biomedical studies, laying the platform for the tangible paths towards the adoption of alternative developing lithographic technologies or their combination with the established patterning techniques, which depends on the needs of the end-user including, for instance, tolerance of inherent limits, fidelity and reproducibility.

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来源期刊
Nanoscale Research Letters
Nanoscale Research Letters NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
15.00
自引率
0.00%
发文量
110
审稿时长
2.5 months
期刊介绍: Nanoscale Research Letters (NRL) provides an interdisciplinary forum for communication of scientific and technological advances in the creation and use of objects at the nanometer scale. NRL is the first nanotechnology journal from a major publisher to be published with Open Access.
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