基于旋转摆动驱动的平面研磨磨料轨迹仿真与实验研究

IF 1.9 3区工程技术 Q3 ENGINEERING, MANUFACTURING

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture Pub Date : 2023-12-08 DOI:10.1177/09544054231210023

Jianhui Zhu, Hang Gao, Yuchun Xu, Yanjun Zhao, Ningchang Wang, Chaoyu Shi

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引用次数: 0

摘要

为了实现微波等离子体化学气相沉积(MPCVD)多晶金刚石片在自由磨料研磨过程中获得优异的表面形状精度，本研究采用了基于旋转摆动驱动的平面研磨。本研究的关键在于建立一个综合的运动学模型，考察磨粒的运动行为，探讨参数对磨粒轨迹均匀性的影响。结果表明，偏心距、弧弦长和速比影响轨迹重合率的概率，进而影响分布均匀性。验证实验验证了运动学模型的可靠性，验证了仿真结果的准确性。在最优参数下，MPCVD多晶金刚石片的最佳表面形状精度(PV)为2.3 μm，与原始研磨方法的PV值仅为8.4 μm相比，有了很大的提高。该研究为大尺寸MPCVD多晶金刚石片的高表面形状精度提供了一种有前途的方法。

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Simulation and experimental research on the abrasive trajectories of plane lapping based on rotary swing drive

In the pursuit of achieving exceptional surface shape accuracy for MPCVD (Microwave Plasma Chemical Vapor Deposition) polycrystalline diamond wafers during the free abrasive lapping process, plane lapping based on rotary swing drive was employed in this study. The crux of this study lay in the development of a comprehensive kinematic model, scrutinizing the motion behavior of abrasive particles, and probing the influence of parameters on the uniformity of abrasive trajectories. The results show that the eccentricity, arc chord length and speed ratio affect the probability of track coincidence rate, and then affect the distribution uniformity. And then the verification experiments solidifying the reliability of our kinematic model and affirming the veracity of simulation results. The best surface shape accuracy ( PV) of the MPCVD polycrystalline diamond wafer was 2.3 μm under optimal parameters, representing a substantial advancement compared to the original lapping method, which only yielded a PV value of 8.4 μm. This study provides a promising method for high surface shape accuracy of MPCVD polycrystalline diamond wafers with large sizes.

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来源期刊

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 工程技术-工程：机械

CiteScore

5.10

自引率

30.80%

发文量

167

审稿时长

5.1 months

期刊介绍： Manufacturing industries throughout the world are changing very rapidly. New concepts and methods are being developed and exploited to enable efficient and effective manufacturing. Existing manufacturing processes are being improved to meet the requirements of lean and agile manufacturing. The aim of the Journal of Engineering Manufacture is to provide a focus for these developments in engineering manufacture by publishing original papers and review papers covering technological and scientific research, developments and management implementation in manufacturing. This journal is also peer reviewed. Contributions are welcomed in the broad areas of manufacturing processes, manufacturing technology and factory automation, digital manufacturing, design and manufacturing systems including management relevant to engineering manufacture. Of particular interest at the present time would be papers concerned with digital manufacturing, metrology enabled manufacturing, smart factory, additive manufacturing and composites as well as specialist manufacturing fields like nanotechnology, sustainable & clean manufacturing and bio-manufacturing. Articles may be Research Papers, Reviews, Technical Notes, or Short Communications.