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自动化维氏硬度系统与闭环控制的抛光垫半导体生产

IF 1.3 4区 工程技术 Q4 CHEMISTRY, ANALYTICAL
Instrumentation Science & Technology Pub Date : 2023-11-16 DOI:10.1080/10739149.2023.2281538
Le Nam Quoc Huy, Le Ngoc Quynh Hoa, Muhamad Amirul Haq, Tan-Thanh Huynh
{"title":"自动化维氏硬度系统与闭环控制的抛光垫半导体生产","authors":"Le Nam Quoc Huy, Le Ngoc Quynh Hoa, Muhamad Amirul Haq, Tan-Thanh Huynh","doi":"10.1080/10739149.2023.2281538","DOIUrl":null,"url":null,"abstract":"Chemical mechanical polishing plays a pivotal role in enhancing the topography of wafers during semiconductor fabrication. The hardness of polishing pads holds great significance as it determines t...","PeriodicalId":13547,"journal":{"name":"Instrumentation Science & Technology","volume":"169 1","pages":""},"PeriodicalIF":1.3000,"publicationDate":"2023-11-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Automated Vickers hardness system with closed-loop control for polishing pads for semiconductor production\",\"authors\":\"Le Nam Quoc Huy, Le Ngoc Quynh Hoa, Muhamad Amirul Haq, Tan-Thanh Huynh\",\"doi\":\"10.1080/10739149.2023.2281538\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Chemical mechanical polishing plays a pivotal role in enhancing the topography of wafers during semiconductor fabrication. The hardness of polishing pads holds great significance as it determines t...\",\"PeriodicalId\":13547,\"journal\":{\"name\":\"Instrumentation Science & Technology\",\"volume\":\"169 1\",\"pages\":\"\"},\"PeriodicalIF\":1.3000,\"publicationDate\":\"2023-11-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Instrumentation Science & Technology\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://doi.org/10.1080/10739149.2023.2281538\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"CHEMISTRY, ANALYTICAL\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Instrumentation Science & Technology","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/10739149.2023.2281538","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"CHEMISTRY, ANALYTICAL","Score":null,"Total":0}
引用次数: 0

摘要

在半导体制造过程中，化学机械抛光在改善晶圆形貌方面起着至关重要的作用。抛光垫的硬度非常重要，因为它决定了…
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Automated Vickers hardness system with closed-loop control for polishing pads for semiconductor production
Chemical mechanical polishing plays a pivotal role in enhancing the topography of wafers during semiconductor fabrication. The hardness of polishing pads holds great significance as it determines t...
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来源期刊
Instrumentation Science & Technology
Instrumentation Science & Technology 工程技术-分析化学
CiteScore
3.50
自引率
0.00%
发文量
45
审稿时长
>12 weeks
期刊介绍： Instrumentation Science & Technology is an internationally acclaimed forum for fast publication of critical, peer reviewed manuscripts dealing with innovative instrument design and applications in chemistry, physics biotechnology and environmental science. Particular attention is given to state-of-the-art developments and their rapid communication to the scientific community. Emphasis is on modern instrumental concepts, though not exclusively, including detectors, sensors, data acquisition and processing, instrument control, chromatography, electrochemistry, spectroscopy of all types, electrophoresis, radiometry, relaxation methods, thermal analysis, physical property measurements, surface physics, membrane technology, microcomputer design, chip-based processes, and more. Readership includes everyone who uses instrumental techniques to conduct their research and development. They are chemists (organic, inorganic, physical, analytical, nuclear, quality control) biochemists, biotechnologists, engineers, and physicists in all of the instrumental disciplines mentioned above, in both the laboratory and chemical production environments. The journal is an important resource of instrument design and applications data.
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