自动化维氏硬度系统与闭环控制的抛光垫半导体生产

IF 16.4 1区化学 Q1 CHEMISTRY, MULTIDISCIPLINARY

Accounts of Chemical Research Pub Date : 2023-11-16 DOI:10.1080/10739149.2023.2281538

Le Nam Quoc Huy, Le Ngoc Quynh Hoa, Muhamad Amirul Haq, Tan-Thanh Huynh

引用次数: 0

摘要

在半导体制造过程中，化学机械抛光在改善晶圆形貌方面起着至关重要的作用。抛光垫的硬度非常重要，因为它决定了…

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Automated Vickers hardness system with closed-loop control for polishing pads for semiconductor production

Chemical mechanical polishing plays a pivotal role in enhancing the topography of wafers during semiconductor fabrication. The hardness of polishing pads holds great significance as it determines t...

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来源期刊

Accounts of Chemical Research 化学-化学综合

CiteScore

31.40

自引率

1.10%

发文量

312

审稿时长

2 months

期刊介绍： Accounts of Chemical Research presents short, concise and critical articles offering easy-to-read overviews of basic research and applications in all areas of chemistry and biochemistry. These short reviews focus on research from the author’s own laboratory and are designed to teach the reader about a research project. In addition, Accounts of Chemical Research publishes commentaries that give an informed opinion on a current research problem. Special Issues online are devoted to a single topic of unusual activity and significance. Accounts of Chemical Research replaces the traditional article abstract with an article "Conspectus." These entries synopsize the research affording the reader a closer look at the content and significance of an article. Through this provision of a more detailed description of the article contents, the Conspectus enhances the article's discoverability by search engines and the exposure for the research.