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微系统应用的氧化铝陶瓷微加工:系统综述、挑战和未来机遇

IF 4.1 2区 材料科学 Q2 ENGINEERING, MANUFACTURING
Materials and Manufacturing Processes Pub Date : 2023-12-05 DOI:10.1080/10426914.2023.2290244
Anurag Shanu, Priyaranjan Sharma, Pradeep Dixit
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引用次数: 0

摘要

本文综述了用于氧化铝陶瓷微特征制备的各种微加工技术的现状。氧化铝作为一种先进的衬底已经出现在各种射频…
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities
This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...
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来源期刊
Materials and Manufacturing Processes
Materials and Manufacturing Processes 工程技术-材料科学：综合
CiteScore
9.00
自引率
22.90%
发文量
132
审稿时长
3.4 months
期刊介绍： Materials and Manufacturing Processes deals with issues that result in better utilization of raw materials and energy, integration of design and manufacturing activities requiring the invention of suitable new manufacturing processes and techniques, unmanned production dependent on efficient and reliable control of various processes including intelligent processing, introduction of new materials in industrial production necessitating new manufacturing process technology, and more. Information is offered in various formats, including research articles, letter reports, review articles, conference papers, applied research, book and conference reviews, and entire issues devoted to symposia. All submitted manuscripts are subject to initial appraisal by the Editors, and, if found suitable for further consideration, to peer review by independent, anonymous expert referees. All peer review is single blind and submission is online via ScholarOne Manuscripts.
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