发布求助
文献互助 智能选刊 最新文献

微系统应用的氧化铝陶瓷微加工:系统综述、挑战和未来机遇

IF 4.1 2区 材料科学 Q2 ENGINEERING, MANUFACTURING
Materials and Manufacturing Processes Pub Date : 2023-12-05 DOI:10.1080/10426914.2023.2290244
Anurag Shanu, Priyaranjan Sharma, Pradeep Dixit
{"title":"微系统应用的氧化铝陶瓷微加工:系统综述、挑战和未来机遇","authors":"Anurag Shanu, Priyaranjan Sharma, Pradeep Dixit","doi":"10.1080/10426914.2023.2290244","DOIUrl":null,"url":null,"abstract":"This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...","PeriodicalId":18266,"journal":{"name":"Materials and Manufacturing Processes","volume":null,"pages":null},"PeriodicalIF":4.1000,"publicationDate":"2023-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities\",\"authors\":\"Anurag Shanu, Priyaranjan Sharma, Pradeep Dixit\",\"doi\":\"10.1080/10426914.2023.2290244\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...\",\"PeriodicalId\":18266,\"journal\":{\"name\":\"Materials and Manufacturing Processes\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":4.1000,\"publicationDate\":\"2023-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Materials and Manufacturing Processes\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://doi.org/10.1080/10426914.2023.2290244\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"ENGINEERING, MANUFACTURING\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials and Manufacturing Processes","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1080/10426914.2023.2290244","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0

摘要

本文综述了用于氧化铝陶瓷微特征制备的各种微加工技术的现状。氧化铝作为一种先进的衬底已经出现在各种射频…
本文章由计算机程序翻译，如有差异，请以英文原文为准。
分享
查看原文 本刊更多论文
Micromachining of alumina ceramic for microsystems applications: a systematic review, challenges and future opportunities
This review article presents the current status of various micromachining techniques used to create microfeatures in alumina ceramic. Alumina has emerged as an advanced substrate in various radio-f...
求助全文
通过发布文献求助，成功后即可免费获取论文全文。 去求助
来源期刊
Materials and Manufacturing Processes
Materials and Manufacturing Processes 工程技术-材料科学：综合
CiteScore
9.00
自引率
22.90%
发文量
132
审稿时长
3.4 months
期刊介绍： Materials and Manufacturing Processes deals with issues that result in better utilization of raw materials and energy, integration of design and manufacturing activities requiring the invention of suitable new manufacturing processes and techniques, unmanned production dependent on efficient and reliable control of various processes including intelligent processing, introduction of new materials in industrial production necessitating new manufacturing process technology, and more. Information is offered in various formats, including research articles, letter reports, review articles, conference papers, applied research, book and conference reviews, and entire issues devoted to symposia. All submitted manuscripts are subject to initial appraisal by the Editors, and, if found suitable for further consideration, to peer review by independent, anonymous expert referees. All peer review is single blind and submission is online via ScholarOne Manuscripts.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：481959085
Book学术官方微信