基于贝塞尔光束的氧化石墨烯激光刻划湿度传感

Ruozhou Li, Jing Yan, Ke Qu, Ying Yu
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引用次数: 0

摘要

激光刻写氧化石墨烯(GO)在高性能、低成本的湿度传感器中显示出巨大的前景。然而,当使用常用的高斯光束时,瑞利长度相对较短,导致大面积处理时潜在的稳定性问题,特别是在发生散焦时。在本文中,我们利用无衍射贝塞尔光束一步制造专门为湿度传感应用设计的还原氧化石墨烯(rGO)电极。研究了离焦和激光功率对制备电极线宽和电阻的影响,给出了氧化石墨烯贝塞尔激光写入的最佳工艺参数。rGO电极的线宽、电阻和片电阻在离焦距离±1.00 mm范围内稳定。在制造过程中,散焦也被证明是减少烧蚀区域的有效方法。研究了电极的温度和湿度响应,重点研究了典型离焦设置下电极的温度和湿度响应,并讨论了相关机制。演示了原理验证的rGO/GO/rGO湿度传感器,并使用具有聚焦和散焦设置的贝塞尔光束一步制造。相应的湿度响应结果表明,即使在散焦情况下,也可以使用贝塞尔光束制造rGO湿度传感器。基于贝塞尔光束的激光制造技术的研究为快速、灵活、经济地生产基于石墨烯的湿度传感器提供了广阔的前景。同时,对离焦的研究可以有效地提高离焦条件下的制造稳定性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laser Scribing of Graphene Oxide Using Bessel Beam for Humidity Sensing
Laser-scribed graphene oxide (GO) shows great promise for high-performance, cost-effective humidity sensors. However, when using the commonly employed Gaussian beam, the Rayleigh length is relatively short, leading to potential stability issues during large-area processing, especially when defocusing occurs. In this paper, we utilize a diffraction-free Bessel beam to one-step fabricate reduced graphene oxide (rGO) electrodes specifically designed for humidity sensing applications. The effects of defocusing and laser power on the line width and resistance of the fabricated electrodes are investigated, giving the optimal processing parameters for Bessel laser writing of GO. The line width, resistance, and sheet resistance of the rGO electrode are stable at a defocusing distance within ±1.00 mm. Defocusing also proves to be effective in reducing the ablation region during the fabrication process. The temperature and humidity responses of the electrodes are examined, focusing on those fabricated with typical defocusing settings, and the related mechanisms are discussed. Proof-of-principle rGO/GO/rGO humidity sensors are demonstrated, and were one-step fabricated using a Bessel beam with both focusing and defocusing settings. The corresponding humidity response results evidence that rGO humidity sensors can be fabricated using a Bessel beam, even in the defocusing cases. The investigation into the Bessel-beam-based laser fabrication technique offers promising prospects for rapid, flexible, and cost-effective production of graphene-based humidity sensors. Meanwhile, the study of defocusing may enhance the fabrication stability to withstand defocusing conditions effectively.
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