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基于离散绕组的磁场时门位移传感器及其误差特性

Q3 Materials Science
Guangxue Jingmi Gongcheng/Optics and Precision Engineering Pub Date : 2023-01-01 DOI:10.37188/ope.20233119.2836
Ziran CHEN, Hengxiao ZHANG, Zhiying HE, Hongyou CHEN, Haiyou YU
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Magnetic field time-gate displacement sensor based on discrete winding and its error characteristics
é’ˆå¯¹é«˜ç²¾åº¦ä½ç§»ä¼ æ„Ÿå™¨éš¾ä»¥åŠ å·¥çš„éš¾é¢˜ï¼Œæå‡ºä¸€ç§åŸºäºŽç¦»æ•£ç»•ç»„çš„ç£åœºå¼æ—¶æ ä½ç§»ä¼ æ„Ÿå™¨ã€‚é€šè¿‡è®¾è®¡ç¦»æ•£æ¿€åŠ±ç»•ç»„æŽ’å¸ƒæ–¹å¼ä¸Žæ„Ÿåº”ç»•ç»„çš„å½¢çŠ¶æŽ§åˆ¶æ„Ÿåº”ä½ç§»ä¿¡å·çš„å˜åŒ–è§„å¾‹ï¼Œé€šè¿‡ç»„åˆæµ‹é‡æ–¹å¼å®žçŽ°ç²¾å¯†ä½ç§»æµ‹é‡ã€‚é€šè¿‡ç†è®ºå»ºæ¨¡ã€ä»¿çœŸåˆ†æžä¸Žå®žéªŒéªŒè¯æ­ç¤ºäº†æ¿€åŠ±ä¿¡å·è¯¯å·®å’Œå®‰è£ åå·®å¯¹ä¼ æ„Ÿå™¨æµ‹é‡ç²¾åº¦çš„å½±å“è§„å¾‹ã€‚å®žéªŒç»“æžœè¡¨æ˜Žï¼šä¸¤è·¯æ¿€åŠ±ä¿¡å·çš„å¹ å€¼ä¸ç­‰å’Œå®‰è£ åå·®éƒ½ä¼šåœ¨å¯¹æžå† æµ‹é‡ç²¾åº¦ä¸­ç›´æŽ¥å¼•å ¥ç›´æµåˆ†é‡è¯¯å·®å’Œ2æ¬¡è°æ³¢è¯¯å·®ï¼Œå ¶ä¸­2æ¬¡è°æ³¢è¯¯å·®æ˜¯è¯¯å·®çš„ä¸»è¦æˆåˆ†ã€‚å®‰è£ åå·®è¶Šå¤§ï¼Œ2次谐波误差越大，动尺沿Z轴偏摆姿态对测量精度的影响最大，沿Yè½´ç¿»è½¬å§¿æ€å¼•å ¥çš„è¯¯å·®æ¬¡ä¹‹ï¼Œæ²¿Xè½´ä¿¯ä»°å§¿æ€å¼•å ¥çš„è¯¯å·®æœ€å°ã€‚è¯¯å·®ä¿®æ­£åŽä¼ æ„Ÿå™¨åœ¨144 mmçš„æµ‹é‡èŒƒå›´å† ï¼Œæµ‹é‡è¯¯å·®å³°å³°å€¼ä¸º4.5 μm，分辨力为0.15 μmã€‚é€šè¿‡æ¯«ç±³çº§å°ºå¯¸çš„æ¿€åŠ±å’Œæ„Ÿåº”ç»•ç»„å®žçŽ°å¾®ç±³çº§ç²¾åº¦æµ‹é‡ï¼Œå¯æ˜¾è‘—é™ä½Žä¼ æ„Ÿå™¨çš„åˆ¶é€ éš¾åº¦ï¼Œå ·æœ‰é‡è¦çš„å·¥ç¨‹åº”ç”¨ä»·å€¼ã€‚
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来源期刊
Guangxue Jingmi Gongcheng/Optics and Precision Engineering
Guangxue Jingmi Gongcheng/Optics and Precision Engineering Materials Science-Electronic, Optical and Magnetic Materials
CiteScore
2.40
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0.00%
发文量
95
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