Si(111)表面iii -氮化物的生长及其在光电二极管中的应用

IF 1 4区 材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY
L. L. Wen, L. S. Chuah, Y. G. Zhang, Y. Yusof, N. M. Ahmed, Z. Hassan
{"title":"Si(111)表面iii -氮化物的生长及其在光电二极管中的应用","authors":"L. L. Wen, L. S. Chuah, Y. G. Zhang, Y. Yusof, N. M. Ahmed, Z. Hassan","doi":"10.15251/djnb.2023.184.1197","DOIUrl":null,"url":null,"abstract":"In this paper, we investigated growth of GaN and Al0.09Ga0.91N epilayer grown on silicon (111) by using II MBE system. The major characterization tools used for this study were high resolution X-ray diffraction (HRXRD), and micro photoluminescence (PL) spectroscopy. Also reported is our attempt to fabricate and characterize metalsemiconductor-metal photodiode based on these films. The responsivity as a function of wavelength for an MSM GaN/Si(111) detector is a sharp cut-off wavelength at 362 nm. A maximum responsivity of 0.256 A/W was achieved at 358 nm. For Al0.09Ga0.91N film, there is a sharp cut-off wavelength at 340 nm. A maximum responsivity of 0.263 A/W was achieved at 338 nm. In UV spectral region, the detector shows a little decrease from 340 to 200 nm. The responsivity of the MSM drops by nearly an order of magnitude across the cut-off wavelength.","PeriodicalId":11233,"journal":{"name":"Digest Journal of Nanomaterials and Biostructures","volume":null,"pages":null},"PeriodicalIF":1.0000,"publicationDate":"2023-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Growth of III-nitrides on Si(111) and its application to photodiodes\",\"authors\":\"L. L. Wen, L. S. Chuah, Y. G. Zhang, Y. Yusof, N. M. Ahmed, Z. Hassan\",\"doi\":\"10.15251/djnb.2023.184.1197\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we investigated growth of GaN and Al0.09Ga0.91N epilayer grown on silicon (111) by using II MBE system. The major characterization tools used for this study were high resolution X-ray diffraction (HRXRD), and micro photoluminescence (PL) spectroscopy. Also reported is our attempt to fabricate and characterize metalsemiconductor-metal photodiode based on these films. The responsivity as a function of wavelength for an MSM GaN/Si(111) detector is a sharp cut-off wavelength at 362 nm. A maximum responsivity of 0.256 A/W was achieved at 358 nm. For Al0.09Ga0.91N film, there is a sharp cut-off wavelength at 340 nm. A maximum responsivity of 0.263 A/W was achieved at 338 nm. In UV spectral region, the detector shows a little decrease from 340 to 200 nm. The responsivity of the MSM drops by nearly an order of magnitude across the cut-off wavelength.\",\"PeriodicalId\":11233,\"journal\":{\"name\":\"Digest Journal of Nanomaterials and Biostructures\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":1.0000,\"publicationDate\":\"2023-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Digest Journal of Nanomaterials and Biostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.15251/djnb.2023.184.1197\",\"RegionNum\":4,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q4\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest Journal of Nanomaterials and Biostructures","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.15251/djnb.2023.184.1197","RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

本文研究了在硅(111)上生长GaN和Al0.09Ga0.91N薄膜。本研究使用的主要表征工具是高分辨率x射线衍射(HRXRD)和微光致发光(PL)光谱。本文还报道了基于这些薄膜制备和表征金属-半导体-金属光电二极管的尝试。MSM GaN/Si(111)探测器的响应度是波长的函数,在362 nm处有一个锐利的截止波长。在358nm处达到了0.256 A/W的最大响应度。对于Al0.09Ga0.91N薄膜,在340 nm处有一个锐利的截止波长。在338 nm处的最大响应度为0.263 A/W。在紫外光谱区,从340 nm到200 nm,探测器略有下降。在截止波长范围内,MSM的响应度下降了近一个数量级。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Growth of III-nitrides on Si(111) and its application to photodiodes
In this paper, we investigated growth of GaN and Al0.09Ga0.91N epilayer grown on silicon (111) by using II MBE system. The major characterization tools used for this study were high resolution X-ray diffraction (HRXRD), and micro photoluminescence (PL) spectroscopy. Also reported is our attempt to fabricate and characterize metalsemiconductor-metal photodiode based on these films. The responsivity as a function of wavelength for an MSM GaN/Si(111) detector is a sharp cut-off wavelength at 362 nm. A maximum responsivity of 0.256 A/W was achieved at 358 nm. For Al0.09Ga0.91N film, there is a sharp cut-off wavelength at 340 nm. A maximum responsivity of 0.263 A/W was achieved at 338 nm. In UV spectral region, the detector shows a little decrease from 340 to 200 nm. The responsivity of the MSM drops by nearly an order of magnitude across the cut-off wavelength.
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来源期刊
Digest Journal of Nanomaterials and Biostructures
Digest Journal of Nanomaterials and Biostructures 工程技术-材料科学:综合
CiteScore
1.50
自引率
22.20%
发文量
116
审稿时长
4.3 months
期刊介绍: Under the aegis of the Academy of Romanian Scientists Edited by: -Virtual Institute of Physics operated by Virtual Company of Physics.
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