Magnetic smart materials enabled micro-pump: design, modeling, and performance analysis

Smart materials have gained significant attention in various industries due to their exceptional properties and unique capabilities. Among these materials, smart magnetic materials have emerged as a promising candidate with the ability to sense and respond to environmental changes. This paper presents a novel micro-pump structure, fabricated using 0.18 µm integrated technology, which can be integrated into microfluidic systems and MEMS devices. In this study, the design and manufacturing process of the micro-pump, utilizing magnetic smart materials, are presented. The characteristics of the smart material and the micro-pump's performance are analyzed through simulations. The proposed micro-pump design incorporates one-way valves and has demonstrated improved efficiency and enhanced performance compared to conventional designs. The results of this study provide a foundation for further research and development of magnetic smart material-based micro-pumps and their potential applications in various fields, including lab-on-a-chip devices and biomedical engineering.