薄膜电学表征的自动霍尔效应实验方法的发展

IF 2.4 Q3 COMPUTER SCIENCE, INTERDISCIPLINARY APPLICATIONS
A. M. Orega
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引用次数: 0

摘要

在最近的过去,微电子工业有了急剧的增长。这些材料的性能受其结构、电学和光学特性等因素的影响,具体取决于它们的应用。因此,精确、快速、方便地测量半导体特性的必要性是不容小觑的。测量的一些理想特征包括可用性、准确性、分辨率、可重复性和一致性,这些都是人工操作系统无法保证的。本研究致力于设计和连接一个自动化的计算机辅助四点探针测试设备,以确定材料的电学特性。四点探头、电磁铁、NI Keithley型号6220精密电流源、型号7001开关、型号2182A纳电压表和型号7065霍尔效应卡仪器通过GPIB集线器连接到PC USB,与运行在计算机中的NI LabVIEW程序接口,以实现其完全控制。利用四探针头探测具有方形对称性的样品,用于测量半导体性质。对标准p型锗样品进行了可靠性试验。收集到的数据与预期结果的偏差在0.32%以内。这项工作形成了自动化类似系统的基础,这些系统本来是设计为手动操作的。关键词:自动霍尔效应,手动操作系统,霍尔角,薄膜,字符串操作例程。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of an Automated Hall Effect Experimentation Method for the Electrical Characterization of Thin Films
There has been drastic growth in the microelectronics industry in the recent past. The performance of these materials is influenced by their structural, electrical, and optical properties among others, depending on their applications. Therefore, the need to conduct measurements of the semiconductor characteristics precisely, quickly, and conveniently cannot be overstated. Some of the desirable features of measurements include usability, accuracy, resolution, repeatability, and consistency which cannot be assured with manually operated systems. This study strived to design and interface an automated computer-aided four-point probe test equipment that characterizes materials to determine their electrical properties. A four-point probe head, an electromagnet, NI Keithley model 6220 Precision current source, model 7001 switch, model 2182A Nanovoltmeter, and model 7065 Hall Effect card instruments were interfaced with the NI LabVIEW program running in a computer through a GPIB hub to a PC USB for its full control. The four-probe head was utilized to probe the samples with a square symmetry that was adopted for the measurement of the semiconductor properties. Reliability tests were conducted on a standard P-type Germanium sample. The collected data was within 0.32% of the expected results. This work forms a basis for automating similar systems that were inherently designed to be operated manually. Keywords: Automated Hall Effect, manually operated systems, Hall angle, thin films, string manipulation routines.
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来源期刊
International Journal of Information and Learning Technology
International Journal of Information and Learning Technology COMPUTER SCIENCE, INTERDISCIPLINARY APPLICATIONS-
CiteScore
6.10
自引率
3.30%
发文量
33
期刊介绍: International Journal of Information and Learning Technology (IJILT) provides a forum for the sharing of the latest theories, applications, and services related to planning, developing, managing, using, and evaluating information technologies in administrative, academic, and library computing, as well as other educational technologies. Submissions can include research: -Illustrating and critiquing educational technologies -New uses of technology in education -Issue-or results-focused case studies detailing examples of technology applications in higher education -In-depth analyses of the latest theories, applications and services in the field The journal provides wide-ranging and independent coverage of the management, use and integration of information resources and learning technologies.
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