Plasma-Induced Reversible Surface Modification and its Impact on Oxygen Heterogeneous Recombination

Abstract A novel model is developed for atomic oxygen surface kinetics in silica-like walls, introducing a plasma-induced surface modification, which may impact intermediate pressure plasma reactors. The model is the first to reproduce experimental measurements in an oxygen glow discharge operating in the pressure range between 0.27 mbar (0.2 Torr) and 4 mbar (3 Torr), showing a decrease with pressure of the O recombination probability on Pyrex between 0.27 mbar and 1 mbar. The numerical simulations suggest that a modification is induced by the production and destruction of metastable chemisorption sites at the surface. As such, the Langmuir-Hinshelwood (L-H) and Eley-Rideal (E-R) recombination mechanisms take place involving not only physisorption (1) and stable chemisorption (2) sites, but also metastable chemisorption sites (3), produced by the impact of fast O2 ions and neutrals. The presence of metastable sites can be reversed by increasing the plasma pressure.