异常辉光放电在铜衬底上形成聚乙炔薄膜

Armando Sarmiento-Santos, Jovanny A. Gómez-Castaño, Brenda Alvarez-Luna, William Redondo-Lancheros, Jaime García-Zúniga
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摘要

等离子体形成聚合物薄膜已成为金属材料涂层的一种替代方法,这些材料需要改变其表面特性并提高其耐腐蚀性;因为用这种方法,原则上可以聚合任何气态烃。在这项工作中,研究了乙炔聚合物薄膜在铜衬底上的形成,之前在氩氢气氛中异常发光放电制度下处理。聚合物的形成是在连续电流异常辉光放电条件下进行的,温度为600℃,氩气含量为60%,氢气含量为35%,C2H2含量为5%,压力为2 Torr,沉积时间为5 ~ 120 s。利用红外光谱和扫描电镜对不同温度下沉积的聚合物薄膜进行了结构和形态分析。此外,使用耐腐蚀分析对材料进行了表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Formation of Polyacetylene Films on Copper Substrate by Abnormal Glow Discharge
The formation of polymeric films by plasma has become an alternative for the coating of metallic materials that require varying their surface characteristics and improving their resistance to corrosion; because by this method it is possible, in principle, to polymerize any gaseous hydrocarbon. In this work, the study of the formation of acetylene polymer films on a copper substrate, previously treated in an abnormal luminescent discharge regime in argon-hydrogen atmosphere, is presented. The polymeric formation was carried out in a continuum current abnormal glow discharge in an atmosphere of 60% Ar, 35% H2 and 5% C2H2 at a pressure of 2 Torr, at a temperature of 600 °C and with deposition times between 5 and 120 s. The structural and morphological analysis of the polymeric film deposited at different temperatures was performed by Infrared Spectroscopy and Scanning Electron Microscopy. Additionally, a characterization of the materials was carried out using corrosion resistance analysis.
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