Sr2+ and Co2+ Co-Doped LaAlO3 Leads to Synergistic Enhancement of Electric Heating and Infrared Radiation Abilities for MEMS Light Source Application

The MEMS infrared light source is one of the core components of the NDIR gas sensor, and its thermal stability, emissivity, and modulation characteristics all have a crucial impact on the accuracy and sensitivity of the entire device for gas detection. This paper provides a detailed analysis of the structure and working principle of MEMS light source chips, and starting from the idea of multi-functional materials, proposes a new MEMS infrared light source chip design concept for achieving high efficiency the electric heating and thermal to light conversions simultaneously by a monolayer of multi-functional material. Based on this concept, La 0.7 Sr 0.3 Al 0.5 Co 0.5 O 3 material was successfully prepared used a chemical co-precipitation method and confirmed by XRD. By doping the Sr 2+ and Co 2+ at the A and B sites of LaAlO 3 material separately, the approximately insulating LaAlO 3 material has a certain degree of conductivity and electric heating ability. Moreover, the co-doping of Sr 2+ and Co 2+ also makes LaAlO 3 material exhibit excellent infrared radiation ability in the range of 2.5–25 μ m. Based on lattice structure of La 0.7 Sr 0.3 Al 0.5 Co 0.5 O 3 and SEM research, the principle of enhancing conductivity and emissivity has been analyzed in detail.