[论文]基于接近电容图像传感器的平板显示器高分辨率缺陷检测

IF 0.5 Q4 ENGINEERING, ELECTRICAL & ELECTRONIC

ITE Transactions on Media Technology and Applications Pub Date : 2023-01-01 DOI:10.3169/mta.11.158

Toshiro Yasuda, Shigetoshi Sugawa, Rihito Kuroda, Yayoi Yokomichi, Kazuhisa Kobayashi, Hiroshi Hamori, Akinobu Teramoto

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引用次数: 0

摘要

研制了一种高灵敏度、高分辨率显示检测的接近电容式图像传感器及测量系统，该系统采用了一种新型的步进式键合垫结构，像素上有薄保护膜。该传感器和系统对264 ppi薄膜晶体管衬底有源区域的线和点缺陷、外围扇形区域的细间距导线缺陷和阵列区域的复杂栅极驱动器缺陷具有良好的检测能力。该技术实现了对显示基板像素和外围区域的细微缺陷的非接触式检测，从而有望进一步提高平板显示器的质量和良率。

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[Paper] High-Resolution Defect Detection for Flat Panel Display Using Proximity Capacitance Image Sensor

A proximity capacitance image sensor and measurement system for high-sensitivity and high-resolution display inspection adopted a new step-type bonding pad structure with the thin protective film on the pixels have been developed. This sensor and system have good detectability of line and point defects in the active area on a 264 ppi thin film transistor substrate and defects of fine pitch wires in peripheral fan-out areas and complex gate driver on array areas. This technology enabled the contactless detection of fine defects in pixel and peripheral areas on display substrate, and thus, further quality and yield improvement of flat panel displays are expected.

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来源期刊

ITE Transactions on Media Technology and Applications ENGINEERING, ELECTRICAL & ELECTRONIC-

CiteScore

1.70

自引率

0.00%

发文量

期刊介绍：・Multimedia systems and applications ・Multimedia analysis and processing ・Universal services ・Advanced broadcasting media ・Broadcasting network technology ・Contents production ・CG and multimedia representation ・Consumer Electronics ・3D imaging technology ・Human Information ・Image sensing ・Information display ・Multimedia Storage ・Others.