机器视觉技术在高性能相位噪声测量芯片缺陷检测中的应用

Jing Zhou
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引用次数: 0

摘要

芯片缺陷问题在工业生产中一直存在,由于芯片缺陷引起的环境问题越来越多,芯片缺陷的识别和检测也越来越受到人们的重视。针对芯片生产过程中芯片缺陷所带来的生态环境问题,本文采用机器视觉技术对高性能相位噪声测量芯片缺陷进行检测。结果表明,机器视觉技术对芯片缺陷的识别准确率可达98%以上。有机废气产生量由5968.0t/a降至4000t/a。有机废水产出量由546m3 /d降至4600m3/d。固体废物产生量由8000t/a降至6500t/a。以上数据都印证了机器视觉技术对于高性能相位噪声测量芯片的缺陷检测具有自动化、检测效率高、缺陷识别精度高等优点。通过改善芯片缺陷,减少芯片生产过程中的废气、废水和固体废物的排放量,从而改善生态环境。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of machine vision technology in defect detection of high-performance phase noise measurement chips
The problem of chip defects has always existed in industrial production, and since there are more and more environmental problems caused by chip defects, people have attached greater importance to the identification and detection of chip defects. Pursuant to the ecological environmental problems caused by chip defects in the process of chip production, this paper uses machine vision technology to detect the defects of high-performance phase noise measurement chips. The results suggest that the accuracy of machine vision technology for the identification of chip defects reaches up to 98%. The production volume of organic waste gas decreases from 5968.0t/a to 4000t/a. The yield of organic wastewater decreases from 5496m3/d to 4600m3/d. The production amount of solid waste reduces from 8000t/a to 6500t/a. The aforementioned data all confirm that machine vision technology has the advantages of automation, high detection efficiency, and high accuracy of defect identification for the defect detection of high-performance phase noise measurement chips. And also, by improving the chip defects, the discharge volume of waste gas, wastewater, and solid waste in the chip production process is reduced, and thereupon the ecological environment is ameliorated.
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