电子器件用钨铜微细电火花加工特性

IF 2 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY
Haridh Vinu, C.H. Vijay Kumar, P. Srikrishna, S. Subramanian, R. Padmanabhan
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引用次数: 0

摘要

【摘要】微加工涉及通过除刃口锋利的刀具以外的作用去除少量材料。最常用的技术是电火花加工(EDM)。在不同的工艺参数下,成品的材料去除率和边缘清晰度都是不同的。本研究旨在表征钨铜的微电火花加工工艺参数,并在使用更小的电极时,在不影响边缘清晰度和表面粗糙度的情况下实现最大的材料去除率。研究了8个工艺参数对材料去除率(MRR)、表面粗糙度(Ra)和刀具磨损率(TWR)的影响。采用田口设计进行了36次试验。方差分析表明,MRR主要受电压、能量和电流的影响,TWR主要受能量和电压的影响。表面粗糙度值Ra受能量、增量深度和脉宽的影响较大,不同于MRR和TWR。通过回归分析推导出较高MRR (10e-3 mm3/min)和较低Ra(0.13µm)的最佳参数集,验证试验结果与预测值偏差小于8%。扫描电镜研究表明,表面凹坑深度越大,MRR越高。关键词:钨铜微细电火花加工优化田口分析披露声明作者未报告潜在利益冲突。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro-electro discharge machining characteristics of tungsten-copper for electronic devices
ABSTRACTMicro-machining involves the removal of small amounts of material by action other than that of a sharp-edged tool. The most common technique being electrical discharge machining (EDM). The material removal rate and edge definition of the finished product are based on different process parameters. This study is aimed to characterise micro-EDM process parameters for tungsten–copper and to achieve maximum material removal rate without affecting the edge definition and surface roughness while using smaller electrodes. Eight process parameters were studied for their influence on the material removal rate (MRR), surface roughness (Ra) and tool wear rate (TWR). Taguchi design of experiments was carried for 36 experimental runs. The ANOVA analysis showed that the MRR depends largely on voltage, energy and current, while the TWR depends on the energy and voltage. The surface roughness value (Ra) was influenced more by energy, incremental depth and the pulse width, thus differing from MRR and TWR. The optimum parameter set for higher MRR (10e-3 mm3/min) and lower Ra (0.13 µm) was deduced from regression analysis, and the confirmation tests showed less than 8 % deviation from the predicted values. The SEM studies showed greater depths of craters in the surface machined for higher MRR.KEYWORDS: Tungsten–coppermicro-EDMmachiningoptimizationTaguchi analysis Disclosure statementNo potential conflict of interest was reported by the author(s).
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来源期刊
Advances in Materials and Processing Technologies
Advances in Materials and Processing Technologies MATERIALS SCIENCE, MULTIDISCIPLINARY-
CiteScore
3.90
自引率
27.30%
发文量
222
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