等离子体氮化与DLC复合表面处理对SUS316不锈钢性能的影响

Tatsuro MORITA, Koichi ANDATSU, Shogo TAKESUE, Morimasa NAKAMURA, Chuji KAGAYA
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引用次数: 0

摘要

全面研究了等离子体氮化与多种类金刚石(DLC)涂层复合表面处理对SUS316奥氏体不锈钢摩擦学性能、力学性能和疲劳性能的影响。在这种混合表面处理中,等离子体渗氮作为预处理,然后采用UBMS(不平衡磁控溅射)方法涂覆三种DLC膜:常规DLC膜、掺硅DLC膜和掺钛DLC膜。随着测试温度的升高,促进了具有高固体润滑性的石墨结构的变化,因此所有dlc涂层材料的摩擦系数都降低了。Si-DLC材料的摩擦系数在室温下最低,但当测试温度超过373 K时,其摩擦系数与普通DLC材料相当。Ti-DLC涂层材料的摩擦系数高于其他两种dlc涂层材料,且不受测试温度的影响。由于基体的微观结构不受等离子体氮化和每层DLC涂层的影响,因此力学性能没有明显变化。等离子体渗氮形成的硬化层有效抑制了表面疲劳裂纹的萌生,显著提高了疲劳强度。在DLC涂层材料中,由于DLC膜下形成的硬化层抑制了疲劳裂纹的产生,其疲劳强度达到了与等离子体氮化材料相同的水平。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effect of Hybrid Surface Treatment Composed of Plasma Nitriding and Various DLC Coatings on Properties of Stainless Steel SUS316
The effect of hybrid surface treatment composed of plasma nitriding and various DLC (diamond-like carbon) coatings on the tribological properties, the mechanical properties and the fatigue properties of austenitic stainless steel SUS316 was comprehensively investigated. In this hybrid surface treatment, plasma nitriding was made as a pre-treatment and then the following three kinds of DLC films were coated by UBMS (unbalanced magnetron spattering) method: a regular DLC film, a silicon-doped DLC (Si-DLC) film and a titanium-doped DLC (Ti-DLC) film, respectively. As the test temperature was increased, the change to the graphite structure with high solid-lubricity was promoted, so the friction coefficients of all DLC-coated materials were reduced. The friction coefficient of the Si-DLC material was the lowest at room temperature, but it became comparable to that of the regular DLC material when the test temperature was beyond 373 K. The Ti-DLC material had a higher friction coefficient than the other two DLC-coated materials without depending on the test temperature. Since the microstructure of the substrate was not influenced by plasma nitriding and each DLC coating, there was no marked change in the mechanical properties with them. The hardened layer formed by plasma nitriding effectively suppressed the initiation of fatigue cracks from the surface and markedly improved the fatigue strength. Also in all DLC-coated materials, since the hardened layers formed under the DLC films suppressed the initiation of fatigue cracks, their fatigue strengths reached the same level as that of the plasma-nitrided material.
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